2019
DOI: 10.1007/s00542-019-04586-x
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Fabrication of coplanar microheater platform for LPG sensing applications

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Cited by 6 publications
(3 citation statements)
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“…These components are designed using UNS N06003 to achieve serviceability with high temperature strength [5,6]. Area of applications of UNS N06003 include 1225 (2022) 012065 IOP Publishing doi:10.1088/1757-899X/1225/1/012065 2 marine structures, land-based utilities in power generation, vehicular components [6], heating sources in electronic devices [10,11,12],aircraft turbine engine parts (equiaxed or single crystal) etc. These are designed based on applicability of desired creep resistance.…”
Section: Introductionmentioning
confidence: 99%
“…These components are designed using UNS N06003 to achieve serviceability with high temperature strength [5,6]. Area of applications of UNS N06003 include 1225 (2022) 012065 IOP Publishing doi:10.1088/1757-899X/1225/1/012065 2 marine structures, land-based utilities in power generation, vehicular components [6], heating sources in electronic devices [10,11,12],aircraft turbine engine parts (equiaxed or single crystal) etc. These are designed based on applicability of desired creep resistance.…”
Section: Introductionmentioning
confidence: 99%
“…Heating in microsystems, referred to as microheaters, has a fundamental role in the operation of different devices, such as thermal flow sensors [ 1 ], microelectromechanical systems (MEMS) gas sensors [ 2 , 3 , 4 , 5 ], liquid petroleum sensing (LPG) [ 6 ], trace detection of explosives [ 7 ], thermal electric generation on microchannels [ 8 ], and temperature control of environment for chemical and biological processes at small scales [ 9 , 10 ]. The temperature control of microsystem devices can be achieved using macroscale equipment, such as incubators and surface heaters.…”
Section: Introductionmentioning
confidence: 99%
“…Similar approaches are currently used for fabricating microheaters, with diverse fabrication methods, both combined or not combined, such as physical vapor deposition (PVD) deposition methods [ 6 , 10 , 23 , 24 , 25 ], photolithography with digital light processing [ 23 ], and laser beam techniques [ 25 ]. Despite all the available techniques, research in emerging countries requires a more cost-effective approach.…”
Section: Introductionmentioning
confidence: 99%