Fabrication of diamond films by a magneto-active plasma CVD using alcohol-hydrogen system

Pulse modulated electron cyclotron resonance plasma for chemical vapor deposition of diamond films

“…Total gas pressure was 0.1 Torr with flowing reaction gases of CH 3 OH ͑15-25 sccm͒/H 2 ͑85-75 sccm͒. 25 Scanning electron microscope ͑SEM͒ images of the fabricated films are shown in Fig. 3.…”

Control of diameter distribution of single-walled carbon nanotubes using the zeolite-CCVD method at atmospheric pressure

“…In contrast, the number of smaller SWCNTs is relatively reduced because of the structure instability [23] and the etching process using the OH radicals [16] and/or hydrogen molecules [32] which may be emitted as a side product owing to catalytic reduction during the formation of SWCNTs. Contrary to the temperature dependence of diameter distribution, the formation of smaller SWCNTs are likely to be facilitated with increasing carbon supply rate at a low temperature.…”