Fabrication of division-of-focal-plane polarizer arrays by electron beam lithography

Yu, Miao; Cao, Lixin; Li, Li; Dong, Litong; Wang, Lu; Chen, Xing; Song, Zhengxun; Weng, Zhankun; Wang, Zuobin

doi:10.1109/3m-nano.2017.8286331

Cited by 4 publications

(3 citation statements)

References 22 publications

(20 reference statements)

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“…Polarization imaging is a new optoelectronic detection system that can obtain one more dimension of scene information compared with traditional imaging, and it has important applications in industrial inspection, biomedicine, remote sensing of the earth, aviation, and marine fields [1][2][3][4][5][6][7]. In general, the polarization camera concepts are divided into three categories: the division of amplitude, the division of the aperture [8], and the division of the focal plane [9][10][11]. The division of the focal plane, where the full Stokes grating capable of modulating the polarization information and the photodetector are directly integrated together, has the advantages of real-time operation and optical system stability, so it has quickly become a strongly tracked research direction.…”

Section: Introductionmentioning

confidence: 99%

Full Stokes Mid-Wavelength Infrared Polarization Photodetector Based on the Chiral Dielectric Metasurface

Cheng,

Zou,

Song

2024

Photonics

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Conventional imaging techniques can only record the intensity of light while polarization imaging can record the polarization of light, thus obtaining a higher dimension of image information. We use the COMSOL software to numerically propose a circular polarization photodetector composed of the dislocated 2-hole Si chiral metasurfaces controlling the circular polarization lights and the HgCdTe (MCT) photodetector chip to detect the intensity of light signals. The chiral metasurfaces can be equated to a significant radiation source of the Z-type current density under the right circularly polarized incidence conditions, which explains the large circular dichroism (CD) of absorption of 95% in chiral photodetectors. In addition, the linear dichroism (LD) of the linear polarization pixel is 0.62, and the extinction ratio (ER) is 21 dB. The full Stokes pixel using the six-image-element technique can almost measure arbitrary polarization information of light at 4 μm operation wavelength. Our results highlight the potential of circular dichroic metasurfaces as photonic manipulation platforms for miniaturized polarization detectors.

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Section: Introductionmentioning

confidence: 99%

Full Stokes Mid-Wavelength Infrared Polarization Photodetector Based on the Chiral Dielectric Metasurface

Cheng,

Zou,

Song

2024

Photonics

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“…A metasurface consisting of a two-dimensional array of meta-atoms with a subwavelength period can flexibly and precisely manipulate the phase and polarization information of light [4][5][6]. The polarization camera concepts are mainly divided into three categories: the division of the amplitude [7], division of the aperture [8], and division of the focal plane [9][10][11]. The division of the focal plane based on optical metasurfaces can be naturally extended to imaging chips with ultra-large arrays and ultra-small pixel spacing.…”

Section: Introductionmentioning

confidence: 99%

The Ultra-Large-Bandwidth Cascade Full-Stokes-Imaging Metasurface Based on the Dual-Major-Axis Circular Dichroism Grating

Cheng,

Song

2023

Nanomaterials

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A dual-major-axis grating composed of two metal–insulator–metal (MIM) waveguides with different dielectric layer thicknesses is numerically proposed to achieve the function of the quarter-wave plate with an extremely large bandwidth (1.0–2.2 μm), whose optical properties can be controlled by the Fabry–Pérot (FP) resonance. For the TE incident mode wave, MIM waveguides with large (small) dielectric layer thicknesses control the guided-mode resonant channels of long (short) waves, respectively, in this miniaturized optical element. Meanwhile, for the TM incident mode wave, the propagation wave vector of this structure is controlled by the hybrid mode of two gap-SPPs (gap-surface plasmon polaritons) with different gap thicknesses. We combine this structure with a thick silver grating to propose a circularly polarizing dichroism device, whose effective bandwidth can reach an astonishing 1.65 μm with a circular polarization extinction ratio greater than 10 dB. The full Stokes pixel based on the six-image element technique can almost accurately measure arbitrary polarization states at 1.2–2.8 μm (including elliptically polarized light), which is the largest bandwidth (1600 nm) of the full Stokes large-image element to date in the near-infrared band. In addition, the average errors of the degree of linear polarizations (Dolp) and degree of circular polarizations (Docp) are less than −25 dB and −10 dB, respectively.

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“…Polarization imaging can further obtain the vector information of the light field, and realize the capture of the surface texture, structure, roughness and other characteristic information of the target [5][6][7][8][9], so it is widely used in remote sensing image enhancement, medical diagnosis and other fields [10][11][12][13][14]. Among various polarization imaging technologies, the division-of-focal-plane polarization imaging technology can realize real-time polarization imaging, and has the advantages of high precision, compact structure, and flexible integration [15][16]. Among them, the four-quadrant micro-polarizer array is the most typical division-of-focal-plane polarizer, which consists of four quadrants of one-dimensional gratings in the directions of 0°, 45°, 90°, and 135° [17][18][19][20].…”

Section: Introductionmentioning

confidence: 99%

A four-step laser interference lithography for patterning pixelated micro-polarizer array

Deng

Lü

Zhai

et al. 2022

Holography, Diffractive Optics, and Applications XII

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Pixelated micro-polarizer array is an attractive polarization imaging device because of its real-time fully detecting capability to Stokes parameters and high integration level. However, this micro-device is commonly fabricated by electron beam lithography, thus is often high-cost. Since periodic unit of this device is a 2×2 array of four types of onedimensional (1D) gratings with different orientations (0°, 45°, 90°, 135°), a low-cost grating fabrication technique, interference lithography (IL), is possible to be used to fabricate this device. In this research, a four-steps exposure patterning method of micro-polarizer array based on single Lloyd's mirror interferometer IL is developed. This interferometer is composed by two perpendicular parts: a mirror and a photoresist holder, and a 1D grating parallel with mirror can be fabricated in the exposure region on photoresist through lithography. A Cr-based mask, whose transparent pattern is a square array of square windows with 15×15 μm 2 window size and 17 μm window spacing, is introduced and clamped onto the photoresist to cut exposure region. In four exposure steps, each 15×15 μm 2 quadrant area of a polarizer array with 2 μm quadrant spacing will be exposed on photoresist, respectively. Between two exposure steps, mask and photoresist substrate need to be simultaneously horizontal rotated, to adjust the orientation of grating fabricated in next exposed quadrant on photoresist. Based on this method, we fabricated the single-state patterned micro-polarizer array, which effectively controls the cost and fabrication cycle. The experimental results show that the photoresist grating within a single window has stable structure, uniform period and good directivity.

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Fabrication of division-of-focal-plane polarizer arrays by electron beam lithography

Cited by 4 publications

References 22 publications

Full Stokes Mid-Wavelength Infrared Polarization Photodetector Based on the Chiral Dielectric Metasurface

Full Stokes Mid-Wavelength Infrared Polarization Photodetector Based on the Chiral Dielectric Metasurface

The Ultra-Large-Bandwidth Cascade Full-Stokes-Imaging Metasurface Based on the Dual-Major-Axis Circular Dichroism Grating

A four-step laser interference lithography for patterning pixelated micro-polarizer array

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