Fabrication of Electrochemical Nanoelectrode for Sensor Application Using Focused Ion Beam Technology

Abstract

The capabilities and applications of the focused ion beam (FIB) technology for detection of an electrochemical signal in nanoscale area are shown. The FIB system, enabling continuous micro-and nanofabrication within only one equipment unit, was used to produce a prototype of electrochemical nanometer-sized electrode for sensor application. Voltammetric study of electrochemically active compound (ferrocenemethanol) revealed the diffusion limiting current (12 pA), corresponding to a disc (planar) nanoelectrode with about 70 nm diameter of contact area. This size is in a good accordance with the designed contact-area (50 nm × 100 nm for width × thickness) of the FIB-produced nanoelectrode. It confi rms that produced nanoelectrode is working properly in liquid solution and may enable correct measurements in nanometer-sized regions.

A New Approach for Sensitive Characterization of Semiconductor Laser Beams Using Metal-Semiconductor Thermocouples

“…The 4-microthermocouples shown in Figure 3 a were fabricated using photolithography techniques only, while the thermocouples presented in Figure 3 b were prepared with FIB milling using the Helios 600 NanoLab DualBeam system. The FIB system is an excellent micro- and nanotechnology tool enabling easy prototyping [ 10 , 11 ] or post-processing customization of individual devices [ 12 ]. Thus, the micro- and nanostructures can be fabricated more precisely and much faster than when standard photolithography or imprint methods are applied.…”

Sensitive Metal-Semiconductor Nanothermocouple Fabricated by FIB to Investigate Laser Beams with Nanometer Spatial Resolution

“…However, the use of the FIB method in the fabrication of nanothermocouples brings new possibilities. The FIB technique is primarily dedicated to carrying out various types of technological processes in micro and nanoscales (i.e., the etching of various materials or deposition of metals and insulators), enabling the fabrication of unique structures or a modification of existing structures [ 19 , 20 , 21 , 22 , 23 ]. The simultaneous observation due to imaging with electrons and ions during FIB machining allows for the direct and precise quality control of performed FIB processes.…”