Fabrication of high-aspect-ratio microstructures on planar and nonplanar surfaces using a modified LIGA process

Marques, Christophe; Desta, Yohannes M.; Rogers, James G.; Murphy, Michael C.; Kelly, Kevin W.

doi:10.1109/84.650130

Cited by 58 publications

(29 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The standard LIGA process (Marques et al 1997) using synchrotron radiation source at the Center for Advanced Microstructures and Devices (CAMD) at the Louisiana State University was used to prepare a metallic micromold insert that features a variety of test patterns. A detailed process was described elsewhere (Kim et al 2000).…”

Section: Pdms Harms Replicationmentioning

confidence: 99%

Rapid replication of polymeric and metallic high aspect ratio microstructures using PDMS and LIGA technology

Kim¹,

Park²,

Lee³

et al. 2002

Microsystem Technologies

View full text Add to dashboard Cite

This paper present a method of rapid replication of polymeric high aspect ratio microstructures (HARMs) and a method of rapid reproduction of metallic micromold inserts for HARMs using polydimethylsiloxane (PDMS) casting and standard LIGA processes. A high aspect ratio (HAR) metallic micromold insert, featuring a variety of test microstructures made of electroplated nickel with 15:1 height-to-width ratio for 300 lm microstructures, was fabricated by the standard LIGA process using deep X-ray lithography (DXRL). A 10:1 mixture of pre-polymer PDMS and a curing agent were cast onto the HAR metallic micromold insert, cured and peeled off to create reverse images of the HAR metallic micromold insert in PDMS. In addition to the replication of polymeric HARMs, replicated PDMS HARMS were coated with a metallic sacrificial layer and electroplated in nickel to reproduce another metallic micromold insert. This method can be used to rapidly and massively reproduce HAR metallic micromold inserts in low cost mass production manner without further using DXRL.

show abstract

Section: Pdms Harms Replicationmentioning

confidence: 99%

Rapid replication of polymeric and metallic high aspect ratio microstructures using PDMS and LIGA technology

Kim¹,

Park²,

Lee³

et al. 2002

Microsystem Technologies

View full text Add to dashboard Cite

show abstract

“…In the past few years, bioMEMS technology such as bulk micromachining (Kovacs et al 1998;Pan et al 2002), LIGA processing (Chang and Kim 2000;Marques et al 1997) hot embossing (Jeon and Chiu 2002;Becker and Heim 1999), and excimer laser cutting (Hui and Qin 2002;Kancharla and Chen 2002) have been successfully used to build microfluidic structures and devices such as the microvalve, the micropump, the microreactor, and the biochip in the range of submicron. Many useful biomedical devices have been developed, e.g.…”

Section: Introductionmentioning

confidence: 99%

Bio-MEMS fabricated artificial capillaries for tissue engineering

et al. 2005

View full text Add to dashboard Cite

In this report, we focus on the microfabrication and cell seeding issues of artificial blood capillaries for tissue engineering. Two different fabrication methods (stainless steel electroforming and silicon electroforming) and a number of materials (PC, Polycarbonate and biocompatible material PLGA, poly lactide-co-glycolides) are implemented to build the vascular network. The vascular network is then used as the scaffold to cultivate the bovine endothelial cell (BEC). During the period of cell cultivation, oxygen and nutrient need to be continuously delivered by a circular pressurizing system. In cell culture, encouraging results are obtained through the dynamical seeding of the BEC on the scaffolds. A systematic cell culture process has been developed after repeated experiments. Successful seeding efficiencies are obtained by using the developed systematic cell culture process

show abstract

“…Direct machining on the surface of a metal roller using diamond cutters and precision turning machines is commonly utilized in industries but is limited to simple and 2D structures with larger feature sizes only. To achieve roller molds with smaller feature sizes and more complex patterns, typical methods are thin mold wrapping [2][3], soft mold casting [4], modified LIGA [5], direct laser machining, and curved surface photolithography [6].…”

Section: Introductionmentioning

confidence: 99%

Fabrication of seamless roller molds using step-and-rotate curved surface photolithography and application on micro-lens array optic film

Chen

et al. 2011

2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

View full text Add to dashboard Cite

This paper describes an innovative approach for fabricating seamless roller molds based on conventional photolithography. The fabricated seamless roller molds are then applied in a UV-curing roller imprinting process to replicate balllens-array microstructures on a polymer substrate, which finally forms a light-converging optical film to be used in back-light units of flat panel displays. The roller imprinting process has the advances such as quickly, low cost and large area. First of all, a method for spread coating of a thin photo-resist (PR) layer on a cylindrical surface of a metal roller is developed. This spread coating system relies on pneumatically driven air flow which squeezes through a narrow gap between a roller and an outer ring, and results in a uniformly coated thin PR layer on the cylindrical surface. Secondly, a step-and-rotate UV-exposure system is constructed for transforming patterns defined by a photo-mask to the coated PR layer. Continuous and seamless patterning on the whole cylindrical surface of the roller is achieved through accurate mechanical alignment and precision rotation control of the roller as well as a parallel UV light source. Finally, using the patterned and developed PR structures as a mask, a variety of microstructures with complicated and seamless patterns can be directly fabricated on the metal roller surface by either chemical etching or electroforming process, which complete the fabrication of seamless roller molds. Through UV-curable roller-imprinting, an optical film with ball-lens-array micro-structures have been fabricated and experiment results show a gain value of luminous of 1.2 has been accomplished.Keywords-seamless roller mold; roller imprinting electropolish; ball lens array optic film

show abstract

Fabrication of high-aspect-ratio microstructures on planar and nonplanar surfaces using a modified LIGA process

Cited by 58 publications

References 7 publications

Rapid replication of polymeric and metallic high aspect ratio microstructures using PDMS and LIGA technology

Rapid replication of polymeric and metallic high aspect ratio microstructures using PDMS and LIGA technology

Bio-MEMS fabricated artificial capillaries for tissue engineering

Fabrication of seamless roller molds using step-and-rotate curved surface photolithography and application on micro-lens array optic film

Contact Info

Product

Resources

About