Fabrication of high-aspect-ratio stepped Cu microcolumn array using UV-LIGA technology

Du, Liqun; Yuan, Baozong; Guo, Bingjiang; Wang, Shuai; Cai, Xin

doi:10.1007/s00542-023-05491-0

Cited by 3 publications

(2 citation statements)

References 31 publications

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“…In most industrial practices, the current densities applied to the LIGA electroforming process are below 2 A/dm 2 . To overcome these limitations, some lower-cost modified LIGA-like techniques such as UV-LIGA [ 22 , 23 ], Laser-LIGA [ 24 ], and ICP-RIE LIGA [ 25 ] have been developed by using conventional light sources or other methods, and photoresists to fabricate the masks. However, compared to LIGA technology, LIGA-like techniques cannot directly achieve HAR-MMMCs in a single step because the ARs of the through-masks they use are much lower.…”

Section: Introductionmentioning

confidence: 99%

“…However, compared to LIGA technology, LIGA-like techniques cannot directly achieve HAR-MMMCs in a single step because the ARs of the through-masks they use are much lower. Although some researchers made some attempts to achieve HAR-MMMCs using multiple electroforming steps with a series of low-thickness through-masks, the electroforms fabricated have greatly reduced geometrical accuracy due to the unavoidable misalignment of the operations [ 22 ].…”

Section: Introductionmentioning

confidence: 99%

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Jet Electroforming of High-Aspect-Ratio Microcomponents by Periodically Lifting a Necked-Entrance Through-Mask

Zhang,

Ming,

Zhang

et al. 2024

Micromachines

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High-aspect-ratio micro- and mesoscale metallic components (HAR-MMMCs) can play some unique roles in quite a few application fields, but their cost-efficient fabrication is significantly difficult to accomplish. To address this issue, this study proposes a necked-entrance through-mask (NTM) periodically lifting electroforming technology with an impinging jet electrolyte supply. The effects of the size of the necked entrance of the through-mask and the jet speed of the electrolyte on electrodeposition behaviors, including the thickness distribution of the growing top surface, deposition defect formation, geometrical accuracy, and electrodeposition rate, are investigated numerically and experimentally. Ensuring an appropriate size of the necked entrance can effectively improve the uniformity of deposition thickness, while higher electrolyte flow velocities help enhance the density of the components under higher current densities, reducing the formation of deposition defects. It was shown that several precision HAR-MMMCs with an AR of 3.65 and a surface roughness (Ra) of down to 36 nm can be achieved simultaneously with a relatively high deposition rate of 3.6 μm/min and thickness variation as low as 1.4%. Due to the high current density and excellent mass transfer effects in the electroforming conditions, the successful electroforming of components with a Vickers microhardness of up to 520.5 HV was achieved. Mesoscale precision columns with circular and Y-shaped cross-sections were fabricated by using this modified through-mask movable electroforming process. The proposed NTM periodic lifting electroforming method is promisingly advantageous in fabricating precision HAR-MMMCs cost-efficiently.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Jet Electroforming of High-Aspect-Ratio Microcomponents by Periodically Lifting a Necked-Entrance Through-Mask

Zhang,

Ming,

Zhang

et al. 2024

Micromachines

View full text Add to dashboard Cite

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Micropillars in Cell Mechanobiology: Design, Fabrication, Characterization, and Biosensing Applications

De Saram,

Nguyen,

Jamali

et al. 2024

Small Science

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Eukaryotic cells possess the remarkable ability to sense and respond to mechanical cues from their extracellular environment, a phenomenon known as mechanobiology, which is crucial for the proper functioning of biological systems. Micropillars have emerged as a prominent tool for quantifying cellular forces and have demonstrated versatility beyond force measurement, including the modulation of the extracellular environment and the facilitation of mechano‐stimulation. In this comprehensive review, innovative strategies in micropillars’ design, fabrication, characterization, and biosensing applications are explored. The review begins with a foundational overview of micropillar‐based cell mechanobiology studies to provide a complete understanding, and then it delves into novel methodologies within each domain. The latter part of the review unveils innovative micropillars’ applications beyond mechanobiology, such as their use in enhancing biosensing surfaces and as upstream fluid manipulators for biosensors. Finally, in this review, future research directions are discussed and the current limitations of these techniques are outlined. Despite the extensive exploration of micropillar applications, a significant gap remains between research advancements and the practical implementation of micropillars in point‐of‐care diagnostics. Bridging this gap is crucial for translating laboratory innovations into real‐world medical and diagnostic tools.

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A new method for preparing ultra-large aspect ratio microcylindrical electrode array by EDM

Jin,

Gong,

Tan

et al. 2024

Arch. Civ. Mech. Eng.

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Fabrication of high-aspect-ratio stepped Cu microcolumn array using UV-LIGA technology

Cited by 3 publications

References 31 publications

Jet Electroforming of High-Aspect-Ratio Microcomponents by Periodically Lifting a Necked-Entrance Through-Mask

Jet Electroforming of High-Aspect-Ratio Microcomponents by Periodically Lifting a Necked-Entrance Through-Mask

Micropillars in Cell Mechanobiology: Design, Fabrication, Characterization, and Biosensing Applications

A new method for preparing ultra-large aspect ratio microcylindrical electrode array by EDM

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