Fabrication of high-frequency moiré gratings for microscopic deformation measurement using focused ion beam milling

Abstract

In this paper, the fabrication technique of high-frequency moiré gratings with a focused ion beam (FIB) is studied thoroughly and comprehensively. The concept is proposed for the first time that the frequency and the size of the grating must be designed to meet the requirements of measurement accuracy and the view field at the same time. Some skills are summarized to get high quality gratings. To check its ability for high temperature use, a grating with a frequency of 2000 lines mm −1 is fabricated on the amorphous SiC micro-beam. SEM moiré are recorded at room temperature and after high temperature of 350 • C and 550 • C respectively. The fringes are distinct at all stages except for a contrast degradation after high temperature, which demonstrates that SEM moiré combined with the grating fabricated by FIB milling is a promising tool to measure microscopic deformation of micro-device at room temperature and high temperature.

Felling of individual freestanding nanoobjects using focused-ion-beam milling for investigations of structural and transport properties

“…To form nanocontacts on individual nanomaterials after scratching and redistribution on the substrate surface for transport properties characterization, very recently, focused-ion-beam induced chemical vapour deposition (FIB-CVD) has been employed for this purpose extensively [14][15][16][17]. The main abilities of FIB technique include the removal and deposition of materials with a high precision, which provides the ideal tool for the rapid prototyping of a whole range of devices in areas such as organic semiconducting nanodevices [14], microelectro-mechanical systems [15], superconducting devices [16] and optical applications [17]. In particular, FIB-CVD allows the formation of complex interconnects in a user-defined area in a single processing step, with resolution comparable to the structures defined by electron-beam lithography.…”

Fabrication Technique of Deformation Carriers (Gratings and Speckle Patterns) with FIB for Microscale/Nanoscale Deformation Measurement

“…In order to design a specimen grating with a proper frequency and a proper size, a process flow is devised as follows [30] …”

Deformation Measurement Method Using Moiré Fringes at High Scanning Speed Under a Laser Scanning Microscope

“…Among various deformation measurement techniques, moiré methods are robust and mature optical methods owing to the non-contact and full-field advantages [2,3]. With the decrease in the sizes of the test objects [4,5], various micron/nano-scale moiré methods have been developed to meet the demands for the micron/nano-scale deformation measurement. The most widely used micron/nano-scale moiré method is the high-power microscope moiré method based on the high-resolution and simple-operation features of high-power microscopes [6,7].…”