Fabrication of high quality aspheric microlens array by dose-modulated lithography and surface thermal reflow

Huang, Shengzhou; Li, Mujun; Shen, Lianguan; Qiu, Jinfeng; Zhou, Yingxue

doi:10.1016/j.optlastec.2017.10.026

Cited by 35 publications

(8 citation statements)

References 22 publications

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“…However, these methods are restricted by manufacturing with expensive devices, particular materials, and time-consuming production procedures [13,14]. Furthermore, available lens geometries are limited, and these current machining methods have difficulty achieving the shape accuracy in lens arrays [15,16]. To realize the production of low-cost and high-precision lenses, ultra-precision machining methods are widely used in manufacturing moulds, including glass moulding and film rolling moulds [17].…”

Section: High Accuracy and Resolutionmentioning

confidence: 99%

“…However, the fabrication of a CMA with complex features brings huge challenges to optical applications. Various techniques for manufacturing CMAs [5][6][7][8][9][10][11][12][13][14][15][16][17][18] are still being developed. The manufacturing techniques can be categorized into nonmechanical and mechanical methods based on the properties of material removal.…”

Section: Introductionmentioning

confidence: 99%

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Fabrication of Cylindrical Microlens Array on RB-SiC Moulds by Precision Grinding with MAWJ-Textured Diamond Wheels

Zhang

Yao

et al. 2022

Applied Sciences

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Cylindrical microlens array (CMA) is applied widely in imaging, sensing, and laser machining fields. Among the many techniques for machining CMA, moulding is considered a mass-production method with low-cost and good accuracy. Aimed at the present problems in the machining of CMA moulds, which include low processing efficiency and the prediction of the surface topography, this paper focused on the fabrication of CMA on RB-SiC moulds by precision grinding with micro-abrasive water jet (MAWJ) textured diamond wheels. The combined rough–fine grinding strategy for ceramic mould materials was proposed. The grinding experiments of CMA were carried out. The ultra-precision grinding method was optimized to obtain high shape accuracy and a high-quality surface of RB-SiC moulds. It was found that by using MAWJ-textured diamond wheels, the profile error in the peak-to-valley value (PV) of the CMA moulds can be further reduced to 6.7 μm by using the combined rough–fine strategy grinding process.

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Section: High Accuracy and Resolutionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Fabrication of Cylindrical Microlens Array on RB-SiC Moulds by Precision Grinding with MAWJ-Textured Diamond Wheels

Zhang

Yao

et al. 2022

Applied Sciences

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“…combined with other silicon-based micromachining processes, microleneses and micro-optical and communicating devices can be fabricated. For example, microlenses can be fabricated by combining the dose-modulated lithography and reflow process [ 25 ]. Microleneses used in the antenna-integrated heterodyne array with high frequency (THz) can be made by reflow with RIE [ 26 , 27 ].…”

Section: Introductionmentioning

confidence: 99%

Micro Aspheric Convex Lenses Fabricated by Precise Scraping

Lin

2022

Micromachines

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An easy, fast, inexpensive, and simple method utilizing a microshaper with a very small knife nose is used to fabricate microconvex aspherical lenses. The microshaper is mounted on a computer numerical control (CNC) machine. To achieve an accurately designed profile of the lens surface, a cutter-path planning algorithm with compensation for knife interference is developed. Exerting this algorithm in CNC machining, the microconvex aspheric surface is precisely scraped. To verify the precise machining of the cutter path planning algorithm, three aspheric surfaces of conic sections (ellipsoid, paraboloid, and hyperboloid) are successfully fabricated. The profiles scraped by the microshaper agree well and precisely with the designed theoretical conic section curve. Using a simple polishing method to make the machined surface smoother, the roughness is reduced from 143 and 346 nm to 52 and 44 nm for the path line direction and its transverse direction, respectively. The micro-aspherical lenses have moderate machining properties using a simple polishing method. The results show that the designed profiles of micro-aspheric convex lenses can be machined precisely and efficiently by the microshaper with the cutter-path planning algorithm developed in this work. From the image comparison formed by the aspherical and spherical microlenses, the aspherical lenses provide a better image. It is feasible that the designed profile of the micro-aspherical lenses with specific functions could be machined using the cutter-path planning algorithm developed in this work.

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“…Xu et al [7] reported a facile method to create Polymers 2021, 13, 2334 2 of 14 microlens arrays with controllable focal length by changing the interfacial energy between the liquid-state acrylate resin and the solidified polydimethylsiloxane (PDMS). Huang et al [8] combined dose-modulated DMD-based lithography and surface thermal reflow process to achieve high-quality aspheric microlens array fabrication.…”

Section: Introductionmentioning

confidence: 99%

The Interface Thermal Resistance Evolution between Carbide-Bonded Graphene Coating and Polymer in Rapid Molding for Microlens Array

et al. 2021

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Surface rapid heating process is an efficient and green method for large-volume production of polymer optics by adopting 3D graphene network coated silicon molds with high thermal conductivity. Nevertheless, the heat transfer mechanism including the interface thermal resistance evolution between 3D graphene network coating and polymer has not been thoroughly revealed. In this study, the interface thermal resistance model was established by simplifying the contact situation between the coating and polymethylmethacrylate (PMMA), and then embedding into the finite element method (FEM) model to study the temperature variations of PMMA in surface rapid heating process. Heating experiments for graphene network were then carried out under different currents to provide the initial heat for heat transfer model. In addition, residual stress of the PMMA lens undergoing the non-uniform thermal history during molding was presented by the simulation model together. Finally, the optimal molding parameters including heating time and pressure will be determined according to calculation results of the interface thermal resistance model and microlens array molding experiment was conducted to illustrate that the interface thermal resistance model can predict the temperature of the polymer to achieve a better filling of microlens array with smooth surface and satisfactory optical performance.

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Fabrication of high quality aspheric microlens array by dose-modulated lithography and surface thermal reflow

Cited by 35 publications

References 22 publications

Fabrication of Cylindrical Microlens Array on RB-SiC Moulds by Precision Grinding with MAWJ-Textured Diamond Wheels

Fabrication of Cylindrical Microlens Array on RB-SiC Moulds by Precision Grinding with MAWJ-Textured Diamond Wheels

Micro Aspheric Convex Lenses Fabricated by Precise Scraping

The Interface Thermal Resistance Evolution between Carbide-Bonded Graphene Coating and Polymer in Rapid Molding for Microlens Array

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