2015
DOI: 10.1117/12.2187584
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Fabrication of high resolution and lightweight monocrystalline silicon x-ray mirrors

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Cited by 6 publications
(7 citation statements)
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“…The mirror substrate fabrication process, [19][20][21][22][23] shown in Fig. 2, starts with a commercially procured block of monocrystalline silicon, measuring 150 mm × 150 mm × 75 mm, shown in the upper-left panel.…”
Section: Mirror Substrate Fabricationmentioning
confidence: 99%
“…The mirror substrate fabrication process, [19][20][21][22][23] shown in Fig. 2, starts with a commercially procured block of monocrystalline silicon, measuring 150 mm × 150 mm × 75 mm, shown in the upper-left panel.…”
Section: Mirror Substrate Fabricationmentioning
confidence: 99%
“…ATHENA 36 PSO 37 A polished mirror is sliced from a block of silicon followed by an etching, polishing, cutting, lightweight process. that the glass sheet can be separated from the mandrel freely after thermal slumping.…”
Section: Spo 36mentioning
confidence: 99%
“…In both techniques the desired surface profile is polished directly onto substrate. One of the techniques under development at Goddard Space Flight Center uses segmented substrates made from crystalline silicon [3], the other utilizes the full-shell approach. The latter utilizes substrates from fused silica (Astronomical Observatory of Brera, Italy) [4,5] or metal [6] (Marshall Space Flight Center.)…”
Section: Introductionmentioning
confidence: 99%