2017
DOI: 10.1111/jace.15044
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Fabrication of highly homogeneous Al‐doped TiO2 nanotubes by nanolamination of atomic layer deposition

Abstract: Conformal parallel arrays of Al-doped TiO 2 nanotubes were fabricated by atomic layer deposition. TiO 2 /Al 2 O 3 bilayered shells were grown on a polycarbonate template by various cyclic sequences of TiO 2 and Al 2 O 3 . The doping level of Al could be tuned by the fraction of cycle number of Al 2 O 3 . From the depth profiles measured by second ion mass spectrometry, Al is uniformly distributed across the thickness, which is also supported by the analyses of X-ray diffraction, X-ray photoelectron spectroscop… Show more

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Cited by 19 publications
(27 citation statements)
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“…The result confirmed that two kinds of oxygen species existed [14]. The binding energy of peak near 529.8 eV is due to ZnO bonds, and the higher binding energy near 531.6 eV may belong to O − and O 2− ions in the oxygen-starved area caused by oxygen vacancies [15]. The O1s peak of ZnO is centred at about 529.7 eV (Fig.…”
Section: Introductionsupporting
confidence: 64%
“…The result confirmed that two kinds of oxygen species existed [14]. The binding energy of peak near 529.8 eV is due to ZnO bonds, and the higher binding energy near 531.6 eV may belong to O − and O 2− ions in the oxygen-starved area caused by oxygen vacancies [15]. The O1s peak of ZnO is centred at about 529.7 eV (Fig.…”
Section: Introductionsupporting
confidence: 64%
“…Figure 6D Figure 7C). 40 In Figure 7C, there are only two strong peaks of Bi 4f at 159.0 and 164.3 eV, which are assigned to the Bi 4f 7/2 and Bi 4f 5…”
Section: Characterizationmentioning
confidence: 97%
“…Nevertheless, it is well-known that TiO 2 photocatalyst is photoactive only in the UV range and its activity is strongly influenced by the recombination of photogenerated electrons and holes [4]. To limit these problems and to improve the photocatalytic activity, numerous strategies have been proposed by several authors such as the introduction of doping ions, the fabrication of nanostructured semiconductors for photocatalysis, including nanosheet, nanotube, and nanorod, various fabrication routes for TiO 2 nanotubes such as hydrothermal, anodization, and template methods [37][38][39][40][41]. For this purpose, Hattori et al developed an all-electrochemical technique for fabricating a bilayer structure made of a titanium dioxide (TiO 2 ) nanotube array (TNA) and a palladium film (TNA/Pd membrane).…”
Section: Hydrogen Production From Water Splitting In Photocatalytic Mmentioning
confidence: 99%
“…Another strategy to improve the TiO 2 photocatalyst activity was reported, very recently, by Su et al [39]. They used a new method, to allow the control of the pore size and doping level, that consists in the fabrication of Al-and Zn-doped TiO 2 nanotubes by atomic layer deposition (ALD) combined with polycarbonate (PC) membrane as the template [40,41]. The bilayers were alternately deposited on the PC membrane template by ALD with various cyclic sequences.…”
Section: Hydrogen Production From Water Splitting In Photocatalytic Mmentioning
confidence: 99%