Fabrication of inductive grid filters for rejection of infrared radiation

Abstract

Inductive grid filters are analyzed and designed with the aim to reject infrared radiation with wavelength larger than one micrometer and to transmit shorter wavelengths. Experimental results on nickel and gold grids are presented. The grids are fabricated by a process involving electron beam lithography, reactive ion etching, and electroplating. Optical characterization results were compared to the calculations.