Fabrication of integrated diamond cantilevers with tips for SPM applications

Kulisch, W.; Malavé, A.; Lippold, G.; Scholz, W.; Mihalcea, C.; Oesterschulze, E.

doi:10.1016/s0925-9635(96)00600-0

Cited by 59 publications

(29 citation statements)

References 12 publications

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“…[140] These films then came to be used as structural materials in MEMS [141][142][143][144][145][146] and NEMS [52,53,55] as high-frequency, high-Q mechanical resonators, [146] micromechanical switches, [147,148] and inkjets for corrosive liquids. [144] As conformal coatings, they have been used for the passivation of surfaces and the fabrication of scanning probe microscopy (SPM) cantilevers, [49,91] and efficient field emitters (Fig. 13c).…”

Section: Applicationsmentioning

confidence: 99%

The CVD of Nanodiamond Materials

Butler

Sumant

2008

Chemical Vapor Deposition

340

261

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The growth and characteristics of nanocrystalline diamond thin films with thicknesses from 20 nm to less than 5 mm are reviewed. These materials contain between 95% and >99.9% diamond crystallites, the balance being made up from other forms of carbon. Within this class of materials there is a continuous range of composition, characteristics, and properties which depend on the nucleation and growth conditions. It is convenient to classify these films as either ultra-nanocrystalline-diamond (UNCD) or nanocrystalline-diamond (NCD) based on their microstructure, properties, and growth environment. In general, UNCD materials are composed of small particles of diamond ca. 2-5 nm in size with sp 2 -carbon bonding between the particles. UNCD is usually grown in argon-rich, hydrogen-poor CVD environments, and may contain up to 95-98% sp 3 -bonded carbon. NCD materials start with high density nucleation, initiating nanometer-sized diamond domains which grow in a columnar manner with the grain size coarsening with thickness. NCD is generally grown in carbon-lean and hydrogen-rich environments. NCD and UNCD exhibit an interesting range of physical properties which find use in X-ray windows and lithography, micro-and nanomechanical and optical resonators, tribological shaft seals and atomic force microscopy (AFM) probes, electron field emitters, platforms for chemical and DNA sensing, and many other applications.

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Section: Applicationsmentioning

confidence: 99%

The CVD of Nanodiamond Materials

Butler

Sumant

2008

Chemical Vapor Deposition

340

261

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“…Cyclotron Resonance [138,139], DC Glow Discharge [140,141] and HFCVD [142][143][144][145][146]. They are typically grown in hydrogen-rich, carbon lean environments, with surface temperatures between 250 and 1000 ºC and pressures higher than 660 Pa [130].…”

Section: Ncd Film Growthmentioning

confidence: 99%

Diamond growth by chemical vapour deposition

Grácio¹,

Fan²,

Madaleno³

2010

J. Phys. D: Appl. Phys.

255

156

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This paper reviews the growth of diamond by chemical vapour deposition (CVD). It includes the following seven parts: (1) Properties of diamond: this part briefly introduces the unique properties of diamond and their origin and lists some of the most common diamond applications. (2) Growth of diamond by CVD: this part reviews the history and the methods of growing CVD diamond. (3) Mechanisms of CVD diamond growth: this part discusses the current understanding on the growth of metastable diamond from the vapour phase. (4) Characterization of CVD diamond: we discuss the two most common techniques, Raman and XRD, which have been intensively employed for characterizing CVD diamond. (5) CVD diamond growth characteristics: this part demonstrates the characteristics of diamond nucleation and growth on various types of substrate materials. (6) Nanocrystalline diamond: in this section, we present an introduction to the growth mechanisms of nanocrystalline diamond and discuss their Raman features. This paper provides necessary information for those who are starting to work in the field of CVD diamond, as well as for those who need a relatively complete picture of the growth of CVD diamond.

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“…[187,188] Daneben finden auch pyramidenfçrmige Spitzen nur aus Diamant, die durch ein Formgebungsverfahren hergestellt sind, Interesse. [189,190] Kürzlich wurden Diamant-Nanodrähte durch Plasmaät-zen von Diamantfilmen, die auf Standard-Si-AFM-Spitzen aufgeschichtet waren, zu AFM-Spitzen gemacht. [62] Die Idee entwickelte sich aus dem Befund, dass durch Anbringen [191] oder Aufwachsen [192] scharfer Objekte, wie z.…”

Section: Suspendierte Einkristall-diamant-nanodrähte (Scd) Für Nanoelunclassified

Diamant‐Nanodrähte: Herstellung, Struktur, Eigenschaften und Anwendungen

Yu¹,

Wu²,

Zhi³

2014

Angewandte Chemie

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Nanodrähte aus sp3‐C‐C‐gebundenem Diamant sind Halbleiter mit einer breiten Bandlücke und einer Kombination ausgezeichneter Eigenschaften wie einer negativen Elektronenaffinität, chemischer Inertheit, einem hohen Elastizitätsmodul, höchster Härte und höchster thermischer Leitfähigkeit bei Raumtemperatur. Über die Herstellung von 1D‐Diamant‐Nanodrähten können die zentralen Eigenschaften von Diamant durch Erhöhen des Verhältnisses von Oberfläche zu Volumen gesteuert und verbessert werden. Der theoretische Vergleich mit Kohlenstoff‐Nanoröhrchen zeigt, dass Diamant‐Nanodrähte energetisch und mechanisch existenzfähige Strukturen sind – die reproduzierbare Synthese kristalliner Diamant‐Nanodrähte bleibt aber schwierig. Wir geben eine aktuelle und umfassende Übersicht über Diamant‐Nanodrähte, in der wir ihre Synthese, Strukturen, Eigenschaften und Anwendungen diskutieren.

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Fabrication of integrated diamond cantilevers with tips for SPM applications

Cited by 59 publications

References 12 publications

The CVD of Nanodiamond Materials

The CVD of Nanodiamond Materials

Diamond growth by chemical vapour deposition

Diamant‐Nanodrähte: Herstellung, Struktur, Eigenschaften und Anwendungen

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