Fabrication of large-scale photonic phased array using a holographic lithography system

Shen, Shaoxin; Ren, Xinyi; Liu, Shou; Yang, Zhou; Zhang, Yuanying

doi:10.1117/1.oe.52.9.095103

Cited by 6 publications

(7 citation statements)

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“…Conventional optical beam steering systems are often large, heavy, and expensive primarily due to the mechanical components and bulky optics that comprise these free-space optical systems. Typically, such aspects cannot be tolerated due to strict limitations on their size, weight, reliability and cost [1][2][3][4]. There is a long history of research efforts directed towards mitigating these issues [2][3][4].…”

Section: Introductionmentioning

confidence: 99%

“…Typically, such aspects cannot be tolerated due to strict limitations on their size, weight, reliability and cost [1][2][3][4]. There is a long history of research efforts directed towards mitigating these issues [2][3][4]. Most recently [5], publications have focused on non-mechanical beam steering systems based on integrating phased arrays [5][6], in which one-dimensional (1D) and two-dimensional (2D) beam steering systems were tailored towards LIDAR applications [7][8][9].…”

Section: Introductionmentioning

confidence: 99%

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A Non-Mechanical Multi-Wavelength Integrated Photonic Beam Steering System

Alshamrani

Grieco

Friedman

et al. 2021

J. Lightwave Technol.

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In this work we experimentally demonstrate a fully packaged one-dimensional beam steering system that is based on a fully CMOS compatible silicon photonics platform. This configuration enables multi-wavelength operation and is suitable for short-wavelength infrared (SWIR) applications from light detection and ranging (LIDAR) to telecommunication and sensing applications. The switching fabric in this system employs a 1x9 array of add/drop ring resonators that are fed by a common waveguide through a single etch input grating. The switching fabric re-directs the resonance wavelengths at each drop waveguide to the output facet at the edge of the chip and into free space. The divergent beams that exit the waveguides along the output facet are then collimated and magnified using an array of micro-lenses (pitch = 750 µm, Diameter = 700 µm) in addition to a two lens afocal system in order to enhance the fill factor and diminish any blind zones between adjacent beams. Each one of these drop waveguides is used to address portion of the steering aperture. Combined together they enable steering across the entire aperture. Multi-wavelength operation is obtained by placing individual titanium tungsten alloy (TiW) heaters on top of each ring resonator to enable wavelength tuning.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A Non-Mechanical Multi-Wavelength Integrated Photonic Beam Steering System

Alshamrani

Grieco

Friedman

et al. 2021

J. Lightwave Technol.

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show abstract

“…Метод записи с применением фазовой маски реализует задачу оптического копирования [8] рельефно-фазовой дифракционной решетки в объемную среду и создания брэгговской дифракционной решетки. Он не требует значительной виброизоляции из-за отсутствия интерферометрических ветвей в оптической схеме [3,[9][10][11][12]. Представленное исследование отличается наклонным освещением фазовой маски одиночным регистрирующим лазерным пучком, что позволяет изготавливать наклонные брэгговские решетки.…”

Section: Introductionunclassified

Исследование Механизма Записи Мультиплексных Брэгговских Дифракционных Решеток С Планарным Вводом-Выводом Оптического Излучения В Стеклянных Световодах

Одиноков¹,

Шишова²,

Жердев³

et al. 2021

Оптика И Спектроскопия

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“…The recording method with the use of a phase mask solves the problems of optical copying [8] of a surfacerelief diffraction grating into a bulk medium and creating a Bragg diffraction grating. It does not require significant vibration isolation owing to the absence of interferometric branches in the optical scheme [3,[9][10][11][12]. This study is distinguished by oblique illumination of the phase mask with a single recording laser beam, which makes it possible to produce oblique Bragg gratings.…”

Section: Introductionmentioning

confidence: 99%

Investigation of the Recording Mechanism of Multiplex Bragg Gratings for Planar Optical Radiation Input/Output in Glass Lightguides

et al. 2021

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The recording process of multiplex Bragg diffraction gratings for lightguide displays by the method of optical copying with use of a phase mask is described. In this experiment, the lightguides are made of photothermorefractive glass. A photoresistive relief phase diffraction grating unattached to the light guide plate is used as a phase mask. A compact augmented reality display is created on the basis of studying the angular multiplexing of such Bragg gratings.

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Fabrication of large-scale photonic phased array using a holographic lithography system

Cited by 6 publications

References 0 publications

A Non-Mechanical Multi-Wavelength Integrated Photonic Beam Steering System

A Non-Mechanical Multi-Wavelength Integrated Photonic Beam Steering System

Исследование Механизма Записи Мультиплексных Брэгговских Дифракционных Решеток С Планарным Вводом-Выводом Оптического Излучения В Стеклянных Световодах

Investigation of the Recording Mechanism of Multiplex Bragg Gratings for Planar Optical Radiation Input/Output in Glass Lightguides

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