Fabrication of LiNbO<sub>3</sub>/LiTaO<sub>3</sub>Superlattice Thin Films and Their Second Harmonic Generation Characteristics

Kobata, Tokihiko; Tsukahara, G.; Uesu, Yoshiaki

doi:10.1080/00150193.2011.577983

Cited by 4 publications

(2 citation statements)

References 15 publications

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“…LN films on C-sapphire substrates were deposited also by PLD, using a KrF excimer laser with 248 nm-wavelength and using LiNbO 3 congruent crystal as a target [33][34][35]. The films were deposited at 550 • C. The oxygen pressure and laser power were 50 mTorr and 2 J cm −2 , respectively.…”

Section: Methodsmentioning

confidence: 99%

Identification of LiNbO₃, LiNb₃O₈and Li₃NbO₄phases in thin films synthesized with different deposition techniques by means of XRD and Raman spectroscopy

Bartasyte

Plaušinaitienė

Abrutis

et al. 2013

J. Phys.: Condens. Matter

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Phase composition of epitaxial/textured LiNbO3 films on sapphire substrates, grown by pulsed laser deposition, atmospheric pressure metal organic chemical vapor deposition and pulsed injection metal organic chemical vapor deposition was studied by conventional x-ray diffraction techniques. Raman spectroscopy, being highly sensitive to the symmetry of materials, was used as a countercheck in the compositional analysis. The wavenumbers of Raman modes of LiNb3O8 and Li3NbO4 phases were identified from Raman spectra of synthesized powders. Asymmetry of profiles of x-ray diffraction reflections of LiNbO3 films was studied. This asymmetry may have different origins which consequently may result in misleading conclusions about phase composition of textured LiNbO3 films.

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Section: Methodsmentioning

confidence: 99%

Identification of LiNbO₃, LiNb₃O₈and Li₃NbO₄phases in thin films synthesized with different deposition techniques by means of XRD and Raman spectroscopy

Bartasyte

Plaušinaitienė

Abrutis

et al. 2013

J. Phys.: Condens. Matter

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“…The first reports on the growth of c ‐axis‐oriented LN films by liquid phase epitaxy on an LT substrate and by RF sputtering on C ‐sapphire substrates appeared in early seventies . Since then these substrates were widely studied for the growth of the Z ‐LN and Z ‐LT films by different methods: LPE, epitaxial growth by melting, RF sputtering pulsed laser deposition (PLD), molecular beam epitaxy (MBE), metal organic, and aqueous precursor solutions, sol–gel, spin coating, microwave oven method, and chemical vapor deposition (CVD) and its derivatives such as thermal plasma CVD, pulsed metal–organic CVD (MOCVD), pulsed‐injection (PI) MOCVD, spray MOCVD, atmospheric pressure aerosol MOCVD, solid source flash evaporation, combinatorial high‐vacuum CVD, atomic layer deposition (ALD), etc. In the following sections, we summarize the problems and the applied strategies for the optimization of growth of high‐quality LN–LT layers.…”

Section: Growth Of Linbo3 and Litao3 Films By Chemical And Physical Mmentioning

confidence: 99%

Toward High‐Quality Epitaxial LiNbO₃ and LiTaO₃ Thin Films for Acoustic and Optical Applications

Bartasyte

Margueron

Baron

et al. 2017

Adv Materials Inter

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In 1928, Zachariasen discovered the LiNbO 3 phase. [1] The first single crystals were grown using the flux method by Matthias Over the past five decades, LiNbO 3 and LiTaO 3 single crystals and thin films have been studied intensively for their exceptional acoustic, electro-optical, and pyroelectric and ferroelectric properties. Today, LiNbO 3 single crystals in electro-optics are equivalent to silicon in electronics, and about 70% of radio-frequency (RF) filters, based on surface acoustic waves, are fabricated on these single crystals. These materials in the form of thin films are needed urgently for the development of the next-generation of high-frequency and/or wide-band RF filters or tuneable frequency filters adapted to the fifth generation of infrastructures/networks/communications. The integration of LiNbO 3 films in guided nanophotonic devices will allow higher operational frequencies, wider bandwidth, and miniaturized optical devices in line with improved electronic conversion. Here, the challenges and the achievements in the epitaxial growth of LiTaO 3 and LiNbO 3 thin films and their integration with silicon technology and to acoustic and guided nanophotonic devices are discussed in detail. The systematic representation and classification of all epitaxial relationships reported in the literature have been carried out in order to help the prediction of the epitaxial orientations in the new heterostructures. Future prospects of potential applications and the expected performances of thin film devices are overviewed, as well.Figure 2. Schematic representation of the layer transfer process by the ion slicing technique consisting of a) ion implantation, b) wafer bonding, c) laser irradiation or heating in order to obtain d) a single crystalline layer on the host (Si) substrate. Reproduced with permission. [53]Figure 3. a,b) Electron microscopy images and c) schematic diagram of a microresonator based on LiNbO 3 film on Si and fabricated by the layer transfer technique. Reproduced with permission. [53]The first reports on the growth of c-axis-oriented LN films by liquid phase epitaxy on an LT substrate and by RF sputtering Adv. Mater. Interfaces 2017, 4, 1600998 www.advmatinterfaces.de www.advancedsciencenews.com Figure 6. Frequency response of a) HBAR and b) FBAR based on thinned X-cut LiNbO 3 layer on Si. Schematic representations of a) HBAR and b) FBAR structures are given in the insets. Reproduced with permission. [78]

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Lithium tantalate film prepared by RF magnetron sputtering and effect of thickness on performance of inorganic electrochromic devices

Zhou,

Xu,

et al. 2024

Ceramics International

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Fabrication of LiNbO₃/LiTaO₃Superlattice Thin Films and Their Second Harmonic Generation Characteristics

Cited by 4 publications

References 15 publications

Identification of LiNbO₃, LiNb₃O₈and Li₃NbO₄phases in thin films synthesized with different deposition techniques by means of XRD and Raman spectroscopy

Identification of LiNbO₃, LiNb₃O₈and Li₃NbO₄phases in thin films synthesized with different deposition techniques by means of XRD and Raman spectroscopy

Toward High‐Quality Epitaxial LiNbO₃ and LiTaO₃ Thin Films for Acoustic and Optical Applications

Lithium tantalate film prepared by RF magnetron sputtering and effect of thickness on performance of inorganic electrochromic devices

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Fabrication of LiNbO3/LiTaO3Superlattice Thin Films and Their Second Harmonic Generation Characteristics

Cited by 4 publications

References 15 publications

Identification of LiNbO3, LiNb3O8and Li3NbO4phases in thin films synthesized with different deposition techniques by means of XRD and Raman spectroscopy

Identification of LiNbO3, LiNb3O8and Li3NbO4phases in thin films synthesized with different deposition techniques by means of XRD and Raman spectroscopy

Toward High‐Quality Epitaxial LiNbO3 and LiTaO3 Thin Films for Acoustic and Optical Applications

Lithium tantalate film prepared by RF magnetron sputtering and effect of thickness on performance of inorganic electrochromic devices

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Product

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Fabrication of LiNbO₃/LiTaO₃Superlattice Thin Films and Their Second Harmonic Generation Characteristics

Identification of LiNbO₃, LiNb₃O₈and Li₃NbO₄phases in thin films synthesized with different deposition techniques by means of XRD and Raman spectroscopy

Identification of LiNbO₃, LiNb₃O₈and Li₃NbO₄phases in thin films synthesized with different deposition techniques by means of XRD and Raman spectroscopy

Toward High‐Quality Epitaxial LiNbO₃ and LiTaO₃ Thin Films for Acoustic and Optical Applications