Fabrication of long range surface plasmon waveguide biosensors in a low-index fluoropolymer

Ren, Pengshuai; Krupin, Oleksiy; Berini, Pierre; Tait, R. Niall

doi:10.1116/1.5027859

Cited by 4 publications

(2 citation statements)

References 31 publications

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“…The structure of an SPP waveguide usually consists of a thin metallic layer deposited directly on a dielectric or separated from a dielectric by an insulator. The SPP waveguides can be found in various applications, such as light signal guiding far beyond the diffraction limit [12][13][14], biosensors [15][16][17] or refractive index sensing sensors [18]. For sensing applications, it requires not only a low-loss SPP wave propagation, but also the direct interaction of SPP waves with detected objects.…”

Section: Introductionmentioning

confidence: 99%

Wedge Surface Plasmon Polariton Waveguides Based on Wet-Bulk Micromachining

Hương¹,

Chính²,

Hoang³

2019

Photonics

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In this paper, we propose and investigate the modal characteristics of wedge surface plasmon polariton (SPP) waveguides for guiding surface plasmon waves. The wedge SPP waveguides are composed of a silver layer deposited onto the surface of a wedge-shaped silicon dielectric waveguide. The wedge-shaped silicon dielectric waveguides are explored from the anisotropic wet etching property of single crystal silicon. The wedge SPP waveguides are embedded in a dielectric medium to form the metal–dielectric interface for guiding the surface plasmon waves. The propagation characteristics of the wedge SPP waveguides at the optical telecommunication wavelength of 1.55 μm are evaluated by a numerical simulation. The influence of the physical parameters such as the dimensions of the wedge SPP waveguide and the refractive index of the dielectric medium on the propagation of the surface plasmon wave is investigated. In addition, by comparing the propagation characteristics, we derive the wedge SPP waveguide with the optimal performance.

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Section: Introductionmentioning

confidence: 99%

Wedge Surface Plasmon Polariton Waveguides Based on Wet-Bulk Micromachining

Hương¹,

Chính²,

Hoang³

2019

Photonics

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“…gives the rationale of the LRSPP waveguide sensing application, using the structure mentioned above to support the excitation and propagation of the 0 mode for LRSPP biosensing [49]. The work of [59] included LRSPP biosensors based on gold waveguides with integrated fluidic channels.…”

Section: Long Range Surface Plasmon Polariton (Lrspp) Biosensorsmentioning

confidence: 99%

Fabrication of Long Range Surface Plasmon Polariton Biosensors incorporating Optical Waveguides and Encapsulated Microfluidic Channels via Wafer Bonding"

Asif¹

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A microfabricated structure incorporating optical waveguides and closed microfluidic channels is an essential component in realizing a practical long range surface plasmon polariton (LRSPP) biosensor. This has been achieved through advances in fabrication processes to realize reliable optical waveguides, and by development of a reliable wafer bonding process to create closed fluid channels. An existing process for fabrication of gold waveguides was modified by introducing ultra-shallow trenches to recess waveguides and present a planar surface for bonding. An improved fluidic channel etching process was characterized and successfully employed, yielding very smooth channel surfaces free from curtaining and grass issues. Optical performance of the complete bonded chips was demonstrated and verified using a cutback measurement method, producing an attenuation loss of 4.92 dB/mm. An alternative hot embossing process for formation of microfluidic channels on TOPAS substrate was investigated. Embossing die was produced on 4-inch silicon wafer using deep reactive ion etching (DRIE) to create 29 µm raised channels, and the die was subsequently used to transfer the channel structure to the TOPAS material. I would like to thank thesis supervisors Dr. Niall Tait and Dr. Pierre Berini, for providing me an opportunity to work in the area of microfabrication in general, and in particular, optical LRSPP biosensor project. It was a fascinating introduction to the field, and an excellent opportunity to learn from their extensive knowledge and experience. It was a great pleasure to work under their supervision and directions. I acknowledge and thank the Carleton University microfabrication staff, Rob Vandusen, Angela Williams and Rodney Aiton for providing training, consultation, and assistance in fabrication techniques and equipment operations. I also thank the staff at the University of Ottawa fabrication facility, Howard Northfield, Ewa Lisicka-Skrzek, Choloong Hahn, and Anthony Olivieri for their help and assistance in equipment usage and consultation. I extend my appreciation and thank my project colleague, Pengshuai Ren who acted as a close mentor for most of the project. I also thank and acknowledge Alex Krupin, Wei Ru, and Zohreh Hirbodvash for device testing. I acknowledge the assistance, consultation, and support received from Dr. Jeremy Upham and thank him for his contribution. I also appreciate the encouragement and motivation from Muhammad Osama Ali throughout this research work and acknowledge Raheel Ahmed for assistance in drawing the device schematics. Finally, I express deep gratitude to my parents, and my wife Saima and three innocent souls, Usva, Ibrahim and Emama for their continuous support and motivation throughout my studies.

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