2022
DOI: 10.3901/jme.2022.11.295
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Fabrication of Massive Metal Microstructures by Rotating Through-mask Electrochemical Transferring Technology

Abstract: :Cost-effective electrochemical fabrication of a vast number of high-quality metal microstructures without patterned seams by has still faced great challenge. A novel rotating through-mask electrochemical transferring technology (RTM-ECT) is proposed, in

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Cited by 4 publications
(1 citation statement)
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“…The variances of the diameter, depth, and roughness of the micro-pits were 18.61 μm², 2.53 μm², and 0.0053 μm², respectively. The results showed that the use of a linear cathode instead of the traditional large-sized cathode resulted in an increased EF from 0.78 to 1.16 [27], which suggested that the presented machining process of the micro-pit arrays had better localization.…”
Section: Resultsmentioning
confidence: 98%
“…The variances of the diameter, depth, and roughness of the micro-pits were 18.61 μm², 2.53 μm², and 0.0053 μm², respectively. The results showed that the use of a linear cathode instead of the traditional large-sized cathode resulted in an increased EF from 0.78 to 1.16 [27], which suggested that the presented machining process of the micro-pit arrays had better localization.…”
Section: Resultsmentioning
confidence: 98%