Fabrication of metal nanowire using carbon nanotube as a mask

Abstract

We report on the fabrication of metal nanowires on an insulating substrate using carbon nanotubes as a new kind of mask material. By irradiating Ar+ ions of 300 eV energy on a nanotube-coated Au/Ti thin layer on a SiO2 substrate, Au/Ti nanowires were successfully formed just underneath the nanotube, indicating that the carbon nanotubes had acted as a good mask against the argon ion bombardment. The Au/Ti wire of a few nanometers in width was frequently observed among the wires of various widths. After the formation of the Au/Ti nanowires, the carbon nanotube on the metal nanowire could be removed by atomic force microscope.

Carbon nanotubes: physics and applications

“…Irradiation-induced phenomena like coalescence [26] and welding [27] of CNTs, tunnelling barrier formation in CNTs by energetic Ar ions [28], creation of links between NTs [29] have been experimentally observed. Experiments also show that CNTs can be used to mask the areas below the tubes against ion bombardment [30], hence providing an alternative to the conventional electron-beam lithography in nanofabrication. Damage creation mechanisms in CNTs differ from those in bulk carbon systems (graphite and diamond), as in CNTs a large fraction of atoms are surface ones.…”

Review: Sensors for Biosignal/Health Monitoring in Electronic Skin

“…CNTs are classified according to their nanoscale size and helicity. Likewise, because fabricating nanowires directly on a surface is impossible, a complicated manufacturing process is needed [ 130 ].…”

“…This hydrogel has potential for manufacturing E-skin, dressings, and transparent bioelectrodes. Chen et al [130] created PPy-doped conductive polymer composites from hydrogenbonded elastomers by solution casting (Figure 7c). The conducting polymer was formed by polymerization of a pyrrole inside the polymer matrix.…”

Study of Carbon Nanotubes as Etching Masks and Related Applications in the Surface Modification of GaAs‐based Light‐Emitting Diodes

“…As a macroscopic material system that could be put into mass production at low costs, the super aligned multiwall carbon nanotube networks have proved their excellent performance in electrical, optical, and mechanical properties . Carbon nanotubes have also been proven to be effective in the fabrication of microscopic mask structures . However, applications are restricted because pure CNTs are not durable in the RIE process.…”