Fabrication of Metallic Nano-Ring Structures by Soft Stamping with the Thermal Uplifting Method

Abstract

In this study, the unconventional microfabrication method by the combined processes of the chemical soft stamping technique with the thermal uplifting technique to fabricate metal nanoarrays on a glass plate is proposed and their feasibility verified. The gold micro-ring arrays on a quartz glass plate are realized by utilizing a chemical template with the thermal uplifting method. Their optical properties are studied experimentally. First, a plastic mold is made of a Biaxially Oriented Polyethylene Terephthalate (BOPET) via the hot embossing method. Then, the Methanal micropatterns are transferred onto an etched surface of a substrate via a soft stamping process with a BOPET mold. The gold thin film is coated onto the methanol patterned glass plate via the Ar+ sputter coating process. Finally, the metallic micro-ring structures are aggregated on a glass plate via the thermal uplifting technique. The LSPR optical properties as the extinction spectrums of the gold micro-ring structure arrays are investigated experimentally. It is confirmed that this method was able to fabricate plasmonic micro-ring arrays with low cost and high throughput.

Templated gold nanocaps for surface-enhanced Raman scattering (SERS) sensors based on monolayer polystyrene colloidal arrays

“…To date, the development of low-cost, highly active, stable, and reproducible SERS substrates remains a challenge. Current studies have focused on nanopatterning techniques, including electron lithography, 7 electron-beam lithography, 8 nanosphere lithography (NSL), [9][10][11][12] etc. Overall, NSL is a cost-effective and reproducible technique that enables large-scale preparation of uniformly ordered nanoparticle arrays.…”

“…Overall, NSL is a cost-effective and reproducible technique that enables large-scale preparation of uniformly ordered nanoparticle arrays. It is often combined with nanofabrication techniques to produce various types of SERS substrates, such as nanostars, 9 nanorings, 10 nanocaps, 11 nanobowls, 12 nanowires, 6 and nanocones. 13 Close-packed polystyrene (PS) and SiO 2 spheres are often used as templates for SERS substrates, as their shells can be easily covered or modified.…”

Versatile Nanoring Fabrication Assisted by Hole-mask Colloidal Lithography

“…Several approaches have been reported in the literature for the fabrication of nanorings including some methods developed within our research group. ,,− Most examples found in the literature require high-cost and top-down approaches, e.g., electron beam lithography (EBL), sputtering redeposition, , soft stamping combined with thermal uplifting, capillary lithography, or using large scale facilities such as for X-ray lithography methods . The major problems that all these alternatives present are that they have been used to control the morphology of the nanoring arrays but are not scalable, present high fabrication costs, and are not favorable in terms of time consumption.…”

Fabrication of Nanogroove Arrays on Acrylic Film Using Micro-Embossing Technique

“…This technique, while innovative, has prompted further investigation into its scalability and application in the real world. Furthermore, the fabrication of metallic nanodot arrays has been explored using the nanochemical stamping technique with a polymer stamp [ 35 , 36 ]. This approach offers a high degree of precision and repeatability, making it suitable for applications in nanoelectronics and photonics.…”