Fabrication of Micro Probe Beam Using MEMS Technology for New Vertical Silicon Probe Card

Mm, Y.; Yoon, Hocheol; Seo, Chang-Taeg; Lee, Jong‐Hyun

doi:10.1143/jjap.44.5759

Cited by 6 publications

(4 citation statements)

References 7 publications

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“…The techniques for manufacturing cantilever beams have been widely applied in atomic force microscopy (Gupta et al 2003), micro-resonators (Tellier and Leblois 2006), chemical reaction detectors (Abedinov et al 2004), environmental sensors (Lee and Lee 2003;Lee et al 2006a, b), micro probe cards (Kim et al 2005) and bio-molecular manipulation devices (Tuomas et al 2008). It has been shown that the coating of a silicon (Si) micro-cantilever structure with a thin layer of an appropriate material such as silicon nitride (SiN x ) induces a thermal coefficient mismatch which causes the cantilever beam to deflect in the upward direction when subjected to thermal loading.…”

Section: Introductionmentioning

confidence: 99%

Design and characterization of MEMS-based flow-rate and flow-direction microsensor

Lee

Wen

Hou

et al. 2009

Microfluid Nanofluid

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This study designs and characterizes a novel MEMS-based flow-rate micro-sensor consisting of a platinum resistor deposited on a silicon nitride-coated silicon cantilever beam. Due to the difference between the thermal conductivities of the silicon nitride film and the silicon beam, the tip of the cantilever structure bends slightly in the upward direction. As air travels across the upper surface of the sensor, it interferes with the curved tip and displaces the beam in either the upward or the downward direction. The resulting change in the resistor signal is then used to calculate the velocity of the air. A flow-direction micro-sensor is constructed by arranging eight cantilever structures on an octagonal platform. Each cantilever is separated from its neighbors by a tapered baffle plate connected to a central octagonal pillar designed to attenuate the aerodynamic force acting on the cantilever beams. By measuring the resistor signals of each of the cantilever beams, the micro-sensor is capable of measuring both the flow rate and the flow direction of the air passing over the sensor. A numerical investigation is performed to examine the effects of the pillar height and pillar-to-tip gap on the airflow distribution, the pressure distribution, the bending moment acting on each beam, and the sensor sensitivity. The results show that the optimum sensor performance is obtained using a pillar height of 0.75 mm and a pillar-to-tip gap of 5 mm. Moreover, the sensitivity of the octagonal sensing platform is found to be approximately 90% that of a single cantilever beam.

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Section: Introductionmentioning

confidence: 99%

Design and characterization of MEMS-based flow-rate and flow-direction microsensor

Lee

Wen

Hou

et al. 2009

Microfluid Nanofluid

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“…[1][2][3][4] Among the devices, RF MEMS switches are promising devices for wireless applications because of various advantages such as their low insertion loss, high isolation, negligible power consumption and wide frequency band coverage, as they have demonstrated superior RF characteristics compared to the conventional solid-state switches. 4) The major concerns for the commercialization of the RF MEMS switches are related to the reliability of the metal contacts.…”

Section: Introductionmentioning

confidence: 99%

Organic Thin-Film Transistor Using High-Resolution Screen-Printed Electrodes

Lim¹,

Kim²,

Yang³

et al. 2009

Jpn. J. Appl. Phys.

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Organic thin-film transistors and inverters were fabricated with screen-printed electrodes. The screen printing ink was formulated with silver nanoparticles for high conductivity and carbon black for a high work function. Under optimum fabrication conditions, a pattern as small as 30 mm could be fabricated. The field effect mobility was calculated to be 7 Â 10 À2 cm 2 V À1 s À1 from the organic thin-film transistor. For this transistor, the ratio of silver nanoparticles to carbon black for screen-printed electrodes was 30 to 70 wt %.

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“…The electrical metal contacts have been more important issues in microelectromechanical systems (MEMS) such as radio frequency (RF) switches, mechanical relays, and wafer probe cards for developing the performance and reliability of the miniaturized devices. [1][2][3][4] Among the devices, RF MEMS switches are promising devices for wireless applications because of various advantages such as their low insertion loss, high isolation, negligible power consumption and wide frequency band coverage, as they have demonstrated superior RF characteristics compared to the conventional solid-state switches. 4) The major concerns for the commercialization of the RF MEMS switches are related to the reliability of the metal contacts.…”

Section: Introductionmentioning

confidence: 99%

Investigation of Similar and Dissimilar Metal Contacts for Reliable Radio Frequency Micorelectromechanical Switches

Kwon

Park

Lee

et al. 2008

jjap

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The evaluation test of various thin film contact materials for reliable radio frequency (RF) microelectromechanical systems (MEMS) switches is presented. Given that two of the most important performance criteria of RF MEMS switches are a low contact resistance and high reliability, the purpose of this study is to search for feasible contact materials and combinations by measuring the contact resistance and hot switching reliability under high current condition. We selected gold, platinum, and iridium for the contact materials and compared the contact resistance and failure point for various similar or dissimilar contacts; Au/Au, Pt/Pt, Ir/Ir, Au/Pt, and Au/Ir using a contact measurement apparatus. Also, we investigated the insertion loss and power handling capability of Au/Au and Au/Ir in the RF MEMS switches. From these studies, it was found that dissimilar contacts such as Au/Pt or Au/Ir are an effective means of enhancing the reliability for high power RF MEMS switches. This evaluation method represents an important step toward the development of reliable metal contacts.

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Fabrication of Micro Probe Beam Using MEMS Technology for New Vertical Silicon Probe Card

Cited by 6 publications

References 7 publications

Design and characterization of MEMS-based flow-rate and flow-direction microsensor

Design and characterization of MEMS-based flow-rate and flow-direction microsensor

Organic Thin-Film Transistor Using High-Resolution Screen-Printed Electrodes

Investigation of Similar and Dissimilar Metal Contacts for Reliable Radio Frequency Micorelectromechanical Switches

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