Fabrication of micro-ultrasonic phased array electrode via electric field-driven printing method
E Cheng,
Yeming Zhu,
Qibo Deng
et al.
Abstract:The electrode is an important part of a micro-ultrasonic phased array, commonly fabricated by magnetron sputtering technology. However, with the expansion of the application field, the structures of the phased arrays are becoming more complex, making the traditional magnetron sputtering method no longer applicable, and the realization of micro-scale phased array electrodes by direct printing technology still faces great challenges. Herein, an electric field-driven direct printing method was proposed to fabrica… Show more
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