2015
DOI: 10.1007/s12541-015-0047-8
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Fabrication of microchannels on transparent PMMA using CO2 Laser (10.6 μm) for microfluidic applications: An experimental investigation

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Cited by 97 publications
(35 citation statements)
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“…Accordingly, the microchannel roughness is similar to that shown in Figure 10a. Figure 11 is the cross-section of a rectangle microchannel, and Figure 12 shows a 30 μm width rectangle microchannel whose size is commensurate with that achieved by some photolithography or laser introduced technologies [36,37]. Moreover, a 30 μm width rectangle microchannel is the smallest obtained during our study.…”
Section: Effect Of Thermal Engraving Velocity and Temperature On Rougsupporting
confidence: 76%
“…Accordingly, the microchannel roughness is similar to that shown in Figure 10a. Figure 11 is the cross-section of a rectangle microchannel, and Figure 12 shows a 30 μm width rectangle microchannel whose size is commensurate with that achieved by some photolithography or laser introduced technologies [36,37]. Moreover, a 30 μm width rectangle microchannel is the smallest obtained during our study.…”
Section: Effect Of Thermal Engraving Velocity and Temperature On Rougsupporting
confidence: 76%
“…Very less study is done on fabrication of micro-channels in hard-to-machine materials like titanium and nickel alloys. The fabrication of micro-channels in non-metallic can be found in various studies showing micro-channels produced in Polycarbonate (PC) [240], polymethyl methacrylate (PMMA) [241], Polydimethylsiloxane (PDMS) [242] and boro-aluminosilicate glass [243].…”
Section: Micro-channel Materialsmentioning
confidence: 99%
“…Engraving of glass substrates by femtosecond laser can eliminate the use of cleanroom environments as well as the need for masks and molds during the fabrication, but standard instruments are expensive and not commonly found in chemical laboratories . On the contrary, standard‐grade CO 2 laser engraving has proven suitable for prototyping microfluidic devices in a variety of materials, including PDMS , PMMA , and paper . Due to the low thermal conductivity and significant coefficient of thermal expansion of common soda lime glass, fabrication of microfluidic devices by laser engraving often leads to cracking and/or a poor channel quality.…”
mentioning
confidence: 99%