Fabrication of Microcoils with Narrow and High Aspect Ratio Lines for Electromagnetic Actuators

Noda, Daiji; Setomoto, Masaru; Hattori, Tadashi

doi:10.1109/mhs.2008.4752453

Cited by 2 publications

(1 citation statement)

References 9 publications

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“…The X-ray exposure at BL11 of NewSUBARU was carried out with the workpiece held in a specially manufactured nine parts operation exposure stage 4 . Thus, this stage makes it feasible to do 3D structure for micro coil [5][6][7][8][9][10] . In this paper, we have fabricated the electromagnetic microactuators with microcoil having high aspect ratio structure using 3D X-ray lithography and metallization techniques.…”

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confidence: 99%

Fabrication and estimation of electromagnetic type microactuators with microcoil

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Recently, the requests for actuator are small size, high output power and lower electrical power, and so on. We are focusing on an electromagnetic type actuator. Nonetheless, this type actuator is known to be unsuitable for miniaturization because an allowable current carrying capacity is small. Therefore, we fabricated microcoil with narrow pitch and high aspect ratio using deep X-ray lithography and metallization techniques. If the aspect ratio is increased, cross section area of coil lines is also increased allowing a greater current path. We have fabricated coil lines with the width of 10 µm and the aspect ratio of over 5 on acrylic pipe surface. For current paths, copper layer was formed between narrow pitch thread structures on pipe by electroforming. Finally, isotropic copper etching was performed until the insulated portions of the wiring were exposed. We have estimated a suction force of electromagnetic actuator using this microcoil. The theoretical values by simulation and actual measurements of suction force were compared. These results are relatively in good agreement with theoretical values. Thus, it is very expected that microcoils with high aspect ratio and microactuators with high output force could be manufactured in spite of the miniature size.

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Section: Introductionmentioning

confidence: 99%

Fabrication and estimation of electromagnetic type microactuators with microcoil

et al. 2008

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Fabrication of high aspect ratio microcoils for electromagnetic actuators

Noda

Setomoto

Hattori

2009

2009 International Symposium on Micro-NanoMechatronics and Human Science

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Actuators are finding increasing use in the various fields and many applications. Therefore, it is one of the most important components in various machines because its performance determines to operate a machine. Among the actuators, we are focusing on electromagnetic actuators that could be driven at a low voltage, high power, high efficiency, and low cost. Then, the majority of actuators used in macroscopic applications are in this type. Recently, the size reduction and sophistication are required for parts and devices. Therefore, actuators, which hold big volume and weight with a part of a product, have been required to reduce their size. Nonetheless, electromagnetic actuators are known to be unsuitable for miniaturization because the allowable current carrying capacity is very small when current paths of coil are microscopic, making it difficult to obtain high power. In addition, it is very difficult to process microscopic current paths by mean of conventional machining technology. Therefore, the key technology to realizing practical electromagnetic microactuators is micro-fabrication process. On the other hand, LIGA (German acronym for Lithographite, Galvanoformung, and Abformung) process (Becker et al. 1986) could be used to fabricate nano-and micro-parts for devices. The LIGA is a total process and have three major steps in the process including Xray lithography, electroforming to fabricate metallic molds, and the use of these molds to form required parts of plastic micro structure. The X-rays that are generated by synchrotron radiation have high directivity and transmission characteristics, and could be used to expose photoresist to deep depths of 1 mm or more. In this X-ray lithography, the NewSUBARU synchrotron radiation facility at our university (Ando et al. 1998) was used. This was operated at energy of 1.0 or 1.5 GeV modes. The X-ray exposure at beamline 11 (BL11) of NewSUBARU was carried out with the workpiece held in a specially manufactured nine parts operation exposure stage (Mekaru et al. 2001), in which two axes are moved by piezoelectric elements, while five of other axes are moved using stepping motor; the remaining two axes are rotated by stepping motor. Thus, this X-ray exposure stage could make it feasible to create three-dimensional (3D) structures (Mekaru et al. 2002). In this research, we have achieved development of 3D deep X-ray lithography technique that we used to produce a high aspect ratio spiral microcoil patterns (

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Fabrication of Microcoils with Narrow and High Aspect Ratio Lines for Electromagnetic Actuators

Cited by 2 publications

References 9 publications

Fabrication and estimation of electromagnetic type microactuators with microcoil

Fabrication and estimation of electromagnetic type microactuators with microcoil

Fabrication of high aspect ratio microcoils for electromagnetic actuators

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