2011
DOI: 10.1039/c0lc00331j
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Fabrication of monolithic 3D micro-systems

Abstract: This article describes a method and platform for fast prototyping of monolithic 3D microstructures, capable of producing arbitrary positive, negative and suspended 3D geometries, as well as sealed spaces and aligned 3D geometries using standard photoresists and few fabrication steps. Here a microfabrication method employing a mask-less micro-projection lithography platform, which co-exists on a routine fluorescence microscope, has been refined to produce a variety of 3D microstructures with up to 5 µm spatial … Show more

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Cited by 19 publications
(17 citation statements)
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“…The lens supporting part of the LOC device was made from Dow Corning Sylgard 184 PDMS (polydimethylsiloxane [21]) with a base/curing agent ratio of 10:1, as negative replicas of a SU-8 (10) template (Microchem Corp., Newton, MA, USA) created with a refined micro projection lithography system (MPLS) described elsewhere [22]. The template created a 30 μm deep circular depression that confines the liquid lens.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…The lens supporting part of the LOC device was made from Dow Corning Sylgard 184 PDMS (polydimethylsiloxane [21]) with a base/curing agent ratio of 10:1, as negative replicas of a SU-8 (10) template (Microchem Corp., Newton, MA, USA) created with a refined micro projection lithography system (MPLS) described elsewhere [22]. The template created a 30 μm deep circular depression that confines the liquid lens.…”
Section: Methodsmentioning
confidence: 99%
“…The LOCs devices used for testing are 3D chambers created using a refined MPLS approach [22]. In order to make closed chambers with their own roof, the exposure depth of a SU-8/S1818 mixture is precisely controlled, as described in a previous work [22].…”
Section: Methodsmentioning
confidence: 99%
“…10 A photosensitive polymer formulation, SU-8 photoresist, was used for fast prototyping of monolithic 3D micro-systems by a mask-less micro-projection lithography platform. 11 Plastics overcome some limitations of PDMS, but their relatively complex fabrication still presents a bottleneck for widespread use for prototyping in academic laboratories. Relative to PDMS, plastics remain more suitable for industrial mass production of microfluidic devices rather than the rapid prototyping seen in most academic laboratories.…”
Section: Fabrication and Operationmentioning
confidence: 99%
“…This monolithic approach is of interest, as recently highlighted [4][5][6], especially for handling fluids, as leakage is prevented thanks to the promotion of device integration, to the reduction of components and to the consequent elimination of joints between parts. As perceived from the aforementioned references, there is a growing concern towards more integrated design and manufacturing procedures linked to these engineering systems.…”
Section: Introductionmentioning
confidence: 99%