Fabrication of monolithic microfluidic channels in diamond with ion beam lithography

Picollo, F.; Battiato, A.; Boarino, Luca; Tchernij, S. Ditalia; Enrico, E.; Forneris, J.; Gilardino, Alessandra; Jakšić, Milko; Sardi, Fiammetta; Skukan, Natko; Tengattini, A.; Olivero, P.; Re, Alessandro; Vittone, E.

doi:10.1016/j.nimb.2017.01.062

Cited by 14 publications

(8 citation statements)

References 33 publications

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“…Alternatively, a hybrid PDMS–diamond biosensor for the detection of charged molecules through NV charge state monitoring is shown in Figure b . Microfluidic structures in diamond have been demonstrated using standard lithographic techniques, epitaxial lateral overgrowth, laser ablation, and ion beam lithography (Figure c–e). The latter two approaches will be described in detail below.…”

Section: Microfluidic Channels In Diamondmentioning

confidence: 99%

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Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation

et al. 2019

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Diamond has attracted great interest as a quantum technology platform thanks to its optically active nitrogen vacancy (NV) center. The NV's ground state spin can be read out optically, exhibiting long spin coherence times of ≈1 ms even at ambient temperatures. In addition, the energy levels of the NV are sensitive to external fields. These properties make NVs attractive as a scalable platform for efficient nanoscale resolution sensing based on electron spins and for quantum information systems. Diamond photonics enhance optical interactions with NVs, beneficial for both quantum sensing and information. Diamond is also compelling for microfluidic applications due to its outstanding biocompatibility, with sensing functionality provided by NVs. However, it remains a significant challenge to fabricate photonics, NVs, and microfluidics in diamond. In this Progress Report, an overview is provided of ion irradiation and femtosecond laser writing, two promising fabrication methods for diamond‐based quantum technological devices. The unique capabilities of both techniques are described, and the most important fabrication results of color center, optical waveguide, and microfluidics in diamond are reported, with an emphasis on integrated devices aiming toward high performance quantum sensors and quantum information systems of tomorrow.

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Section: Microfluidic Channels In Diamondmentioning

confidence: 99%

“…Copyright 2013, 2019, American Chemical Society and Springer Nature, respectively. c) Schematic of the monolithic fabrication of a microfluidic channel by means of ion beam lithography (adapted with permission . Copyright 2017, Elsevier) and d,e) optical micrographs of the obtained structures (adapted with permission .…”

Section: Microfluidic Channels In Diamondmentioning

confidence: 99%

Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation

et al. 2019

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“…Channels in fluidic systems have always been difficult to fabricate, especially in the case of diamond where mold techniques [9][10][11] with the use of sacrificial layers are usually adopted. Focusing ion beam technology [12,13], or alternatively reactive ion etching [14] have also been used for monolithic microfluidic channels fabrication or surface modification on diamond, with lengthy processes or inefficient etching rates.…”

Section: Introductionmentioning

confidence: 99%

Pulsed Bessel beam-induced microchannels on a diamond surface for versatile microfluidic and sensing applications

Jedrkiewicz

Kumar

Sotillo

et al. 2017

Opt. Mater. Express

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We present a laser machining method based on the use of pulsed Bessel beams to create, by single pass transverse writing, three-dimensional trench-like microstructures on a synthetic monocrystalline diamond substrate. By tuning the laser pulse energy and the writing speed, it is possible to control the features of the surface trenches obtained and to optimize the resulting high aspect-ratio and low roughness microstructures. This work confirms the potentialities of quasi-stationary beams in ultra-fast laser inscription technology. In particular the presented results show the possibility to fabricate deep and precise microfluidic channels on biocompatible diamond substrates, offering a great potential for biomedical sensing applications

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“…optically transparent/opaque and electrical insulator/conductor for diamond/graphite, respectively) exploiting the metastable nature of this latter carbon allotrope. For these reasons, several applications have been explored in literature realizing functional structures, including waveguides [ 57 ] or photonic structure [ 24 ], microfluidic channels [ 80 ] and other devices, such as micro-electromechanical systems [ 70 ] or ionizing radiation detectors [ 28 ]. Ion beams with energies from kilo-electron volts up to mega-electron volts are employed to promote the formation of structural damages within the diamond lattice, by inducing the formation of vacancies that promote the progressive amorphization of the crystal structure (a random network of sp3- and sp2-carbon atoms).…”

Section: Detection Of Neurotransmitter Release and Action Potentials mentioning

confidence: 99%

Advanced real-time recordings of neuronal activity with tailored patch pipettes, diamond multi-electrode arrays and electrochromic voltage-sensitive dyes

Kühn¹,

Picollo

Carabelli

et al. 2020

Pflugers Arch - Eur J Physiol

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To understand the working principles of the nervous system is key to figure out its electrical activity and how this activity spreads along the neuronal network. It is therefore crucial to develop advanced techniques aimed to record in real time the electrical activity, from compartments of single neurons to populations of neurons, to understand how higher functions emerge from coordinated activity. To record from single neurons, a technique will be presented to fabricate patch pipettes able to seal on any membrane with a single glass type and whose shanks can be widened as desired. This dramatically reduces access resistance during whole-cell recording allowing fast intracellular and, if required, extracellular perfusion. To simultaneously record from many neurons, biocompatible probes will be described employing multi-electrodes made with novel technologies, based on diamond substrates. These probes also allow to synchronously record exocytosis and neuronal excitability and to stimulate neurons. Finally, to achieve even higher spatial resolution, it will be shown how voltage imaging, employing fast voltage-sensitive dyes and two-photon microscopy, is able to sample voltage oscillations in the brain spatially resolved and voltage changes in dendrites of single neurons at millisecond and micrometre resolution in awake animals.

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Fabrication of monolithic microfluidic channels in diamond with ion beam lithography

Cited by 14 publications

References 33 publications

Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation

Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation

Pulsed Bessel beam-induced microchannels on a diamond surface for versatile microfluidic and sensing applications

Advanced real-time recordings of neuronal activity with tailored patch pipettes, diamond multi-electrode arrays and electrochromic voltage-sensitive dyes

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