Fabrication of Nano-Crystalline Diamond Duplex Micro-Gear by Hot Filament Chemical Vapor Deposition

Wang, Hongjun; Zuo, Dunwen; Xu, Feng; Lu, Wei

doi:10.2320/matertrans.m2016334

Cited by 7 publications

(3 citation statements)

References 24 publications

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“…The spectrum was decomposed into six component peaks located at wavenumber positions 1141, 1333, 1343, 1496, 1583 and 1668 cm −1 , using a Voigt function. The reliable signature of the nanodiamond phase in the films was verified by the presence of two correlated humps (ū 1 ) and (ū 3 ) appearing at 1141 and 1496 cm −1 respectively, which are associated with the (C=C) chain stretching and (C-H) wagging modes of trans-polyacetylene (t-PA) segments at the grain boundaries of NDC films [44]. A diamond peak was clearly observed at 1333 cm −1 [45] which confirms the presence of first-order sp 3 (C-C) diamond bonding.…”

Section: Resultsmentioning

confidence: 96%

Influence of different pretreatments on the adhesion of nanodiamond composite films on Ti substrates via coaxial arc plasma deposition

Osman

Ali

Zkria

et al. 2023

Mater. Res. Express

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In this study, we report on the novel growth of nanodiamond composite (NDC) films on Ti substrates using the coaxial arc plasma deposition (CAPD) at room temperature, which offers several advantages over conventional growth techniques. CAPD employs a unique coaxial arc plasma gun structure that provides a supersaturated condition of highly energetic C+ ions for ultrafast quenching on the substrate, promoting the growth of nanodiamond grains. This allows for NDC films’ growth on diverse substrates without the need for initial seeding or substrate heating. However, the growth of NDC films on Ti substrates at room temperature is challenging due to the native oxide layer (TiO2). Here, we grew NDC films on Ti substrates using three different pretreatments: (i) hydrofluoric acid (HF) etching, (ii) insertion of a titanium carbide (TiC) intermediate layer, and (iii) in-situ Ar+ plasma etching. The morphology and structure of the grown NDC films were examined by 3D laser, high-resolution scanning electron microscopies (HR-SEM), Raman, and X-ray photoelectron (XPS) spectroscopies. Our results demonstrate that in-situ Ar+ plasma etching is the most effective pretreatment method for completely removing the native TiO2 layer compared to the other two ex-situ pretreatments, in which re-oxidation is more likely to occur after these pretreatments. Furthermore, NDC films grown using the hybrid Ar+ ion etching gun (IG) and CAPD exhibit the highest sp3 content (63%) and adhesion strength (16 N).

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Section: Resultsmentioning

confidence: 96%

Influence of different pretreatments on the adhesion of nanodiamond composite films on Ti substrates via coaxial arc plasma deposition

Osman

Ali

Zkria

et al. 2023

Mater. Res. Express

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show abstract

“…Among the recent works, using pure and surfactant-added TMAH to fabricate new shapes of both fixed and suspended parts, with only one photolithography step [84]; using microelectrical discharge machining, in addition to soft lithography, to build micro metallic parts of high surface quality [85]; and combining hot-filament chemical vapor deposition (HFCVD) with inductively coupled plasma (ICP) etching to fabricate nanocrystalline diamond parts [86] can be mentioned.…”

Section: New Designs and Fabrication Techniques In Memsmentioning

confidence: 99%

A holistic survey on mechatronic Systems in Micro/Nano scale with challenges and applications

Ghanbarzadeh-Dagheyan

Jalili

Ahmadian

2021

J Micro-Bio Robot

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Micro/Nano mechatronic systems might be defined as systems that include nano-or micro-scale components. These components can be sensors, actuators, and/or physical structures. Furthermore, the high-precision control laws for such small scales are important to ensure stability, accuracy, and precision in these systems. In this writing, four categories of such small-scale systems are considered by providing multifarious novel or key examples from the literature: control engineering and modeling, design and fabrication, measurement engineering, and sensor/actuator development. The applications discussed in the examples vary from nano-positioners, crucial in systems such as atomic force microscopes, to biological sensors like carbon nano-tubes that respond to chemical or molecular stimuli. It is observed that in many instances, especially in micro−/nano-robots, the categories overlap for the completion of a system that needs to be small in size, to be controllable with high accuracy, to have high precision sensing capacity, and finally to be able to carry out submillimeter measurements. Thus, a holistic point of view upon such systems is necessary for future applications. This paper does not limit the type of sensors or actuators to the industrial ones and extends the investigated examples to encompass biological sensing and actuating mechanisms that respond to chemical stimuli, proposing for the inclusion of these units in nano −/micro-mechatronic systems intended to be used in human body or other bio-environments. Several other research opportunities are discussed, challenges in the field are identified, and some propositions are put forward for future directions.

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“…Over the past decade, due to the outstanding physical and chemical characteristics such as high hardness, good optical transparency, excellent thermal conductivity and carrier mobility and very long free-carrier recombination lifetimes [1], single crystal diamond (SCD) prepared by chemical vapour deposition (CVD) has been widely applied as the precision cutting tools, the fabrication of gem stones and the transparent of optical window [2]. Recently, microwave plasma CVD (MPCVD) [3], hot filament CVD [4] and direct current arc plasma jet CVD (DC arc plasma jet CVD) [5] have been gradually developed for SCD fabrication, and the SCD products with large size and high quality had been successfully synthesised [6].…”

Section: Introductionmentioning

confidence: 99%

Synthesis of multiple single crystal diamonds by DC-GD-CVD

Lyu

Wang

et al. 2019

Surface Engineering

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Multiple single crystal diamonds (SCDs) were first synthesised on 24 high pressure high temperature (HPHT) synthetic type Ib (100) SCD seeds by direct current glow discharge plasma chemical vapour deposition (DC-GD-CVD) system with gas mixture of CH 4 -H 2 -Ar.Owing to the increase of the formed plasma density and temperature caused by the addition of 1.2 vol.-% Ar gas, a high growth rate of 22.2 µm h −1 for diamonds deposition was achieved by the plasma with diameter of 2 inches at 900-950°C. After deposition for 50 h, diamond material with a thickness of about 1 mm was uniformly deposited on each seed. The average FWHM value, hardness and transmittance of as-obtained SCDs were 3.2 cm −1 , 105 GPa and 69.4%, revealing the high quality of multiple SCDs fabricated by the DC-GD-CVD method.

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Fabrication of Nano-Crystalline Diamond Duplex Micro-Gear by Hot Filament Chemical Vapor Deposition

Cited by 7 publications

References 24 publications

Influence of different pretreatments on the adhesion of nanodiamond composite films on Ti substrates via coaxial arc plasma deposition

Influence of different pretreatments on the adhesion of nanodiamond composite films on Ti substrates via coaxial arc plasma deposition

A holistic survey on mechatronic Systems in Micro/Nano scale with challenges and applications

Synthesis of multiple single crystal diamonds by DC-GD-CVD

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