2003
DOI: 10.1109/tmag.2003.815729
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Fabrication of Nb-Fe-B thick-film magnets by high-speed PLD method

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Cited by 41 publications
(29 citation statements)
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“…Two compositions that had exhibited good characteristics in experiments with the oxidation of neodymium [9] were used, namely, Nd 2.4 Fe 14 B and Nd 2.6 Fe 14 B. The target was irradiated by a laser.…”
Section: Experimental Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…Two compositions that had exhibited good characteristics in experiments with the oxidation of neodymium [9] were used, namely, Nd 2.4 Fe 14 B and Nd 2.6 Fe 14 B. The target was irradiated by a laser.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…The authors have reported the fabrication of Nd-Fe-B magnetic films several tens of micrometers thick using PLD (Pulsed Laser Deposition). These magnets had coercivities above 1000 kA/m [7][8][9]. In this study, aiming at applying these film magnets to millimeter-size motors, we examined further improvement of characteristics as explained below.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4][5][6][7] Triode sputtering is particularly well adapted to MEMS development, as very high sputtering rates can be achieved over large surface areas and thick textured films can be produced having magnetic properties comparable to those of sintered magnets. 2,7 Hard magnetic films may be exposed to elevated temperatures either in the course of fabrication (e.g.…”
Section: Introductionmentioning
confidence: 99%
“…High performance Nd-Fe-B-type bonded micro-magnets have increasingly found new applications, such as the magnet in micro-motor and the like [1][2][3]. For preparation of the high performance bonded micro-magnet, fine NdFe-B-type anisotropic particles are required and they need to maintain the high permanent magnetic performance even when they are processed to fine particles.…”
Section: Introductionmentioning
confidence: 99%