2009
DOI: 10.1117/1.3066521
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Fabrication of nonlinear optical devices in ionically self-assembled monolayers

Abstract: The development of both "soft" and "hard" fabrication techniques for the patterning of nonlinear photonic devices in ionically selfassembled monolayer ͑ISAM͒ films is reported. A combination of electron beam lithography and reactive ion etching was used to pattern twodimensional holes with a lattice of 710 nm and diameters ranging from 550 to 650 nm. A soft alternative to this fabrication was also demonstrated. Nanoimprint lithography was successfully employed to pattern similar photonic structures with averag… Show more

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Cited by 2 publications
(2 citation statements)
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References 46 publications
(89 reference statements)
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“…SAMs are often used to coat such surfaces and to modify their adhesion and frictional properties. Some of their other potential applications are in lubrication [10], surface engineering, micro/nanofabrication [11], thin-film nonlinear optics, corrosion prevention and microlithography [12], biosensors [13], biological receptors, nonlinear optical materials [14], and selective filters for chemical sensors [15].…”
Section: Introductionmentioning
confidence: 99%
“…SAMs are often used to coat such surfaces and to modify their adhesion and frictional properties. Some of their other potential applications are in lubrication [10], surface engineering, micro/nanofabrication [11], thin-film nonlinear optics, corrosion prevention and microlithography [12], biosensors [13], biological receptors, nonlinear optical materials [14], and selective filters for chemical sensors [15].…”
Section: Introductionmentioning
confidence: 99%
“…For each type, there are several techniques applied. Physical deposition techniques for thin organic films include physical vapor deposition (PVD) [38][39][40][41][42], organic vapor phase deposition (OVPD) [43][44][45], organic molecular beam deposition (OMBD) [46][47][48][49][50][51], solvent vapor annealing (SVA) [52][53][54][55][56], self-assembled monolayers (SAMs) [57,58], inkjet printing [59,60], pulsed laser deposition (PDL) [61][62][63][64], and laser evaporation [65][66][67] techniques. The chemical methods include solution techniques and gas-phase deposition methods.…”
Section: Introductionmentioning
confidence: 99%