Fabrication of Ordered Gold Nano Dot Array by Nano Plastic Forming and Self-Assembly

Abstract

A new fabrication method of ordered metal nano dot array is developed by using coating, nano plastic forming (NPF) and self-assembly due to annealing. In this study, the combination of these processes is studied to produce uniformly-sized and ordered gold nano dot array on a quarts glass substrate experimentally. The results reveal that patterning of lattice grooves on the gold-coated substrate with the NPF is effective to obtain the ordered gold nano dot array. In the proposed fabrication process, the size of the gold nano dot can be controlled by adjusting pitch of the groove. Furthermore, to investigate the effect of the NPF on the dot ordering, the multi-phase-field simulation of the self-assembly of the gold thin-film during the annealing is performed. From the simulation results, it is revealed that the grooves formed by the NPF become a starting point for the dot-formation during the annealing and the surface patterning by the NPF plays an important role for the fabrication of the ordered nano dot array.

Review—Nanopillar Structure in the Direction of Optical Biosensor On-Chip Integration

“…84 Their approach is using NPF combined with the thermal dewetting process. [84][85][86] This demonstrated low-cost yet high-throughput plasmonic. NPLA structure has been successfully fabricated without resist employment or deposition of the adhesion layer.…”

“…However, the report of fabrication of nanopillar by this technique nowadays is still rarely found except for the fabrication of nanodots. 86,91 Figure 5 shows the comparison of schemes of EBL, NIL, and NPF techniques to produce nanopillars.…”

Regularly-formed three-dimensional gold nanodot array with controllable optical properties

“…Figure 2 shows the NPF equipment. Details of the equipment are explained in previous papers [19][20][21]. A single crystal diamond knife-edge tool shown in figure 2 was used for the experiment.…”

“…An alternative simple method for the fabrication of nanodot arrays is based on the dewetting process of thin metal films on a substrate. Authors have developed a new method to fabricate twodimensional (2D) nanodot arrays through the combination of nano-plastic forming (NPF) and thermal dewetting [19,20]. In this method, various process conditions including pitch setting, annealing time and annealing temperature are controlled to tune the size and morphology of the nanodot array.…”

3397 Finite-Difference-Time-Domain Analysis of Optical Properties of Ordered Nano-Dots Array Fabricated with Nano Plastic Forming

“…Recently, we have proposed a new fabrication method of the metal nano-dots array by a combination of the nano plastic forming (NPF) technique which is direct imprinting method and the self-assembly of thin film during high-temperature annealing. With the proposed method, we have already demonstrated that well-ordered gold (Au) nano-dots array can be fabricated efficiently [6]. Also, the size and interparticle distance can be controlled by adjusting the condition of the NPF and the annealing.…”