Fabrication of ordered nanoporous anodic alumina prepatterned by mold-assisted chemical etching

Lai, Kuan-Liang; Hon, Min–Hsiung; Leu, Ing‐Chi

doi:10.1186/1556-276x-6-157

Cited by 10 publications

(8 citation statements)

References 23 publications

(30 reference statements)

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“…These include imprinting with optical diffraction grating [92], lithographically fabricated Si 3 N 4 [93] or Ni stamps [94], imprinting with self-assembled monoor multi-layer of microbeads [95,96], surface patterning by focused ion-beam (FIB) lithography [97][98][99], interference lithography [100], holographic lithography [101], block-copolymer lithography [102], step-and-flash imprint lithography (SFIL) [103], and soft lithography utilizing elastomeric poly-dimethylsiloxane (PDMS) stamp [104]. Each of these techniques has its advantages and disadvantages.…”

Section: Control Of the Arrangement And Shape Of The Poresmentioning

confidence: 99%

Structural Engineering of Porous Anodic Aluminum Oxide (AAO) and Applications

Lee

2015

Nanoporous Alumina

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Porous anodic aluminum oxide (AAO) films can be conveniently produced by anodization of aluminum. Porous oxide layer formed on aluminum contains a large number of mutually parallel pores. Each cylindrical nanopore and its surrounding oxide constitute a hexagonal cell aligned normal to the metal surface. Under proper conditions, the oxide cells are self-organized to form a hexagonally close-packed structure. The novel and tunable structural features of porous AAOs have been intensively exploited for templated synthesis of a variety of functional nanostructures and also for fabrication of nanodevices. On the other hand, porous AAOs with modulated pores may provide an additional degree of freedom in templated synthesis. In addition, they can be used as model systems for systematically investigating structure-property relations of nanostructured materials. Based on the anodization techniques developed recently, one can fabricate porous AAOs with tailor-made internal pore structures. This chapter is devoted to conveying the most recent advances in structural engineering of porous AAOs and nanotechnology applications. In order to provide context, a brief description is given of the general structure and fundamental electrochemical processes associated with pore formation. Subsequently, two common anodizing techniques (i.e., mild and hard anodizations) that have been explored for nanotechnology applications are discussed. Next, various nanostructuring approaches for custom-designed porous AAOs are reviewed. The chapter covers the properties of porous AAOs derived from structural engineering and their applications to various nanotechnology researches and finally presents the challenges and future prospects.

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Section: Control Of the Arrangement And Shape Of The Poresmentioning

confidence: 99%

Structural Engineering of Porous Anodic Aluminum Oxide (AAO) and Applications

Lee

2015

Nanoporous Alumina

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“…In the past, AAO nanochannel arrays were grown in phosphoric or oxalic acid. The results of analysis of the circularities of the holes produced from one-step AAO processes [16][17][18][19][20][21][22][23][24][25][26][27] are shown in Figure 1. It can be seen that it is difficult to grow good quality arrays with a period in the range from 150 to 300 nm in phosphoric acid using the traditional AAO method.…”

Section: Definition and Simulationmentioning

confidence: 99%

Fabrication of Orderly Copper Particle Arrays on a Multi‐Electrolyte‐Step Anodic Aluminum Oxide Template

Chen

Chan

Lee

et al. 2013

Journal of Nanomaterials

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A multi-electrolyte-step (MES) anodic aluminum oxide (AAO) method was used to achieve nanochannel arrays with good circularity and periodic structure. The nano-channel array fabrication process included immersion in a phosphoric acid solution with a 120–150 bias voltage. Bowl-shaped structures were then formed by removing the walls of the nano-channel arrays. The nano-channel arrays were grown from the bottom of the bowl structure in an oxalic solution using a 50 V bias voltage. A comparison of this new MES process with the one-step and five-step AAO process showed a 50% improvement in the circularity over the one-step process. The standard deviation of the average period in the MES array was 25 nm which is less than that of one-step process. This MES method also took 1/4 of the growing time of the five-step process. The orderliness of the nano-channel arrays for the five-step and MES process was similar. Finally, Cu nanoparticle arrays with a 200 nm period were grown using an electroplating process inside the MES nano-channel arrays on fluorine doped tin oxide glass. Stronger surface plasmon resonance absorption from 550 nm to 750 nm was achieved with the MES process than was possible with the one-step process.

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“…To improve the control of the formation of AAO arrays, various top-down methods have been proposed in the literature to prepattern the aluminum surface prior to the electrochemical treatment. Among them, focused ion beam lithography [8], holographic lithography [9], block copolymer micelles [10], soft imprinting [11], mould-assisted chemical etching [12], colloidal lithography [13], nanoindentation [14], nanoimprint lithography (NIL) [15,16], and guided electric field [17] can be cited. Such approaches are not only very interesting in terms of pores positioning and control of pore's size distribution but also allow the use of a micrometer-thick initial aluminum layer supported by a silicon wafer.…”

Section: Introductionmentioning

confidence: 99%

In Situ Investigation of the Early-Stage Growth of Nanoporous Alumina

Gorisse

Dupré

Zelsmann

et al. 2018

Journal of Nanomaterials

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We report the successful use of in situ grazing incidence small-angle X-ray scattering to follow the anodization of aluminum. A dedicated electrochemical cell was designed and developed for this purpose with low X-ray absorption, with the possibility to access all azimuthal angles (360°) and to remotely control the temperature of the electrolyte. Three well-known fabrication techniques of nanoporous alumina, i.e., single, double, and pretextured, were investigated. The differences in the evolution of the scattering images are described and explained. From these measurements, we could determine at which moment the pores start growing even for very short anodization times. Furthermore, we could follow the thickness of the alumina layer as a function of the anodization time by monitoring the period of the Kiessig fringes. This work is aimed at helping to understand the different steps taking place during the anodization of aluminum at the very early stages of nanoporous alumina formation.

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Fabrication of ordered nanoporous anodic alumina prepatterned by mold-assisted chemical etching

Cited by 10 publications

References 23 publications

Structural Engineering of Porous Anodic Aluminum Oxide (AAO) and Applications

Structural Engineering of Porous Anodic Aluminum Oxide (AAO) and Applications

Fabrication of Orderly Copper Particle Arrays on a Multi‐Electrolyte‐Step Anodic Aluminum Oxide Template

In Situ Investigation of the Early-Stage Growth of Nanoporous Alumina

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