Fabrication of PDMS (polydimethylsiloxane) microlens and diffuser using replica molding

Shih, Teng-Kai; Chen, Chia–Fu; Ho, Jeng Rong; Chuang, Fang-Tzu

doi:10.1016/j.mee.2006.05.006

Cited by 131 publications

(56 citation statements)

References 11 publications

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“…A recent report discusses the approach of using poly(acrylic acid) filters integrated with custom-designed CMOS imager ICs to detect fluorescent microspheres [107]. Polydimethylsiloxane (PDMS) could offer a more versatile material to fabricate lenses, filters, diffusers and other components for optical sensors [108]. PDMS is a silicone-based organic polymer that is soft, flexible, biocompatible and optically transparent and well amenable to various microfabrication techniques.…”

Section: Biosensors On Cmos Detectorsmentioning

confidence: 99%

CMOS Photodetectors

Albert¹,

C-K.²,

Vamsy³

2011

Photodiodes - World Activities in 2011

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Section: Biosensors On Cmos Detectorsmentioning

confidence: 99%

CMOS Photodetectors

Albert¹,

C-K.²,

Vamsy³

2011

Photodiodes - World Activities in 2011

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“…On the other hand, surface-relief diffusers rely on the microstructure on the surface of the polymer films or sheets to scatter light. Many methods have been developed to fabricate surface-relief diffusing by replicating microstructures onto the surface of polymer sheet, including Polydimethylsiloxane (PDMS) replica molding [5], photo-fabrication [6], holographic recording method [7], hot embossing [8] and etc. However, most replication methods employ complex processes and require expensive equipment.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of the polymer surface-relief diffusers by using the extrusion roller embossing process

Wang¹,

Zhang²,

Wang³

2014

Advances in Intelligent Systems Research

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Abstract-This paper an innovative and effective extrusion roller embossing process, which enables the rapid fabrication of surface-relief polymer diffusers. The metallic roller mould bearing the microstructures is fabricated using the chemical corrosion method. During the extrusion roller embossing process, the extruded polymer sheet is immediately pressed against the surface of the roller mould. Under the proper processing parameters, high-performance polymer diffusers have been successfully fabricated. The shape, uniformity and optical properties of fabricated diffuser have been verified. The experimental results suggest that the extrusion roller embossing process could provide an effective way for continuous fabricating high-performance polymer surface-relief diffusers with the high-performance, low cost and high throughout.

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“…Micrometer-scale lens arrays have been widely investigated and fabricated for their incorporation into micro-optical devices such as liquid-crystal display (LCD) projectors, charge coupled device (CCD) image sensors, three-dimensional (3D) televisions, etc [1][2][3][4][5]. The fabrication techniques used to produce microlens arrays have already been reported by many researchers; typical techniques include the thermal reflow of photoresist materials [2,6,7], the gray-scale mask method [8][9][10], and the ion diffusion method [11].…”

Section: Introductionmentioning

confidence: 99%