Fabrication of photonic crystals by deep x-ray lithography

Feiertag, G.; Ehrfeld, W.; Freimuth, H.; Kölle, Harald; Lehr, H.; Schmidt, Martin; Sigalas, M. M.; Soukoulis, C. M.; Kiriakidis, G.; Pedersen, Thomas Garm; Kühl, J.; Koenig, W.

doi:10.1063/1.120431

Cited by 136 publications

(68 citation statements)

References 18 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…[95,96] Through LIGA, highaspect-ratio PhCs up to six crystal periods thick have been fabricated with sub-micrometer precision and low surface roughness. Synchrotron-based deep X-rays are used to expose poly(methyl methacrylate) (PMMA) through a patterned absorber mask.…”

Section: X-ray Lithography Electroforming Molding (Liga)mentioning

confidence: 99%

Introducing Defects in 3D Photonic Crystals: State of the Art

2006

View full text Add to dashboard Cite

Public Reporting burden for this collection of information is estimated to average 1 hour per response, including the time for reviewing instructions, searching existing data sources, gathering and maintaining the data needed, and completing and reviewing the collection of information. Send comment regarding this burden estimates or any other aspect of this collection of information, including suggestions for reducing this burden, to Washington Headquarters Services, Directorate for information Operations and Reports, 1215 Jefferson Davis Highway, Suite 1204, Arlington, VA 22202-4302, and to the Office of Management and Budget, Paperwork Reduction Project (0704-0188,) Washington, DC 20503. AGENCY USE ONLY ( Leave Blank)2. REPORT DATE Advanced Materials, 18, 2665-2678 (2006). 3D photonic crystals (PhCs) and photonic bandgap (PBG) materials have attracted considerable scientific and technological interest. In order to provide functionality to PhCs, the introduction of controlled defects is necessary; the importance of defects in PhCs is comparable to that of dopants in semiconductors. Over the past few years, significant advances have been achieved through a diverse set of fabrication techniques. While for some routes to 3D PhCs, such as conventional lithography, the incorporation of defects is relatively straightforward; other methods, for example, selfassembly of colloidal crystals (CCs) or holography, require new external methods for defect incorporation. In this review, we will cover the state of the art in the design and fabrication of defects within 3D PhCs. The figure displays a fluorescence laser scanning confocal microscopy image of a y-splitter defect formed through two-photon polymerization within a CC. SUBJECT TERMS 15. NUMBER OF PAGES 1416. PRICE CODE SECURITY CLASSIFICATION OR REPORT UNCLASSIFIED SECURITY CLASSIFICATION ON THIS PAGE UNCLASSIFIED SECURITY CLASSIFICATION OF ABSTRACT UNCLASSIFIED LIMITATION OF ABSTRACT UL IntroductionPhotonic crystals (PhCs) are materials that possess spatial periodicity in their dielectric constant on the order of the wavelength (k) of light. These materials can strongly modulate light [1] and, with sufficient dielectric contrast and an appropriate geometry, may exhibit a photonic bandgap (PBG). This concept was first proposed in 1975 by Bykov [2] but remained relatively unknown until the seminal work of Yablonovitch [3] and John. [4] In a rough analogy to semiconductors, which possess an electronic bandgap, a PBG material prohibits the existence of photons with energies in the PBG. PhCs are naturally classified by the dimensionality of their periodicity, and in order to rigorously prevent the propagation of PBG frequencies in all directions, a 3D PhC with an omnidirectional, or complete PBG (cPBG) is required. cPBG materials have been fabricated and well characterized for operation at microwave and radio frequencies, however, operation in the visible and IR requires the characteristic length scales of these structures to be scaled down by several orders of magnitude...

show abstract

Section: X-ray Lithography Electroforming Molding (Liga)mentioning

confidence: 99%

Introducing Defects in 3D Photonic Crystals: State of the Art

2006

View full text Add to dashboard Cite

show abstract

“…Owing to the inherent size scale, initial studies were focused on cavity structures for microwave devices. 5,6 With the maturation of nanometer-size photonic crystal fabrication in semiconductors [7][8][9] and other dielectrics 10,11 there has been strong interest in creating optical microcavities for spontaneous emission control.…”

Section: Introductionmentioning

confidence: 99%

Defect modes of a two-dimensional photonic crystal in an optically thin dielectric slab

1999

View full text Add to dashboard Cite

show abstract

“…They continued attempting to miniaturize further the two popular diamond structures: the "yablonovite" and the layer-by-layer. Feiertag et al [58,59] employed a deep x-ray lithographie technique to fabricate a yablononite. In par ticular, they used x-ray irradiation through a Au mask of holes in triangular arrangement onto a polymethylmethacrylate (PMMA) resist.…”

Section: History Of Electromagnetic Wave Propagation In Periodic Strumentioning

confidence: 99%