Fabrication of Photonic Wire and Crystal Circuits in Silicon-on-Insulator Using 193-nm Optical Lithography

Selvaraja, Shankar Kumar; Jaenen, Patrick; Bogaerts, Wim; Thourhout, Dries Van; Dumon, Pieter; Baets, Roel

doi:10.1109/jlt.2009.2022282

Cited by 207 publications

(122 citation statements)

References 21 publications

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“…10 The waveguides are 500 nm wide and 220 nm high and we only excite the transverse-electric (TE) mode of the waveguide. The ring resonators have a footprint of 12 × 12 μm 2 and are grouped in sets of four rings with slightly increasing circumference.…”

Section: Silicon-on-insulator Designmentioning

confidence: 99%

Measurement of small molecule diffusion with an optofluidic silicon chip

et al. 2013

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In this work we explore the micro-ring resonator platform to study the diffusion-driven mass transport of small molecules within microfluidic channels. The micro-ring resonators are integrated on a silicon-on-insulator photonic chip and combined with microfluidics in poly(dimethylsiloxane) (PDMS). We apply a strong initial gradient in the solute concentration and use the micro-ring resonators to observe how this concentration evolves over time and space. This can be achieved by tracking the optical resonances of multiple micro-rings as they shift with changing solute concentration. Experiments are performed for both glucose and NaCl and at different temperatures. The measured concentration profiles are used to calculate the diffusion coefficient of both glucose and NaCl in water. The good agreement between measurement and theoretical prediction demonstrates the relevance of this method.

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Section: Silicon-on-insulator Designmentioning

confidence: 99%

Measurement of small molecule diffusion with an optofluidic silicon chip

et al. 2013

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“…To reduce the process development costs, 200 mm dummy SOI wafers were fabricated by depositing 220 nm of amorphous Si on top of 2000 nm high density plasma silicon dioxide instead of crystalline SOI wafers. After layer deposition, the circuit pattern is first transferred into the photoresist using 193 nm optical lithography and followed by dry etching [6]. During lithography, the wafers are coated with 77 nm of organic bottom anti-reflective coating layer (BARC) and 330 nm of photoresist.…”

Section: Experiments Designmentioning

confidence: 99%

“…The source power was inductively coupled to the plasma through the quartz top plate in the chamber, while the wafer temperature was kept at 60 o C. The etch gases used in our study are Cl 2 , O 2 , HBr, CF 4 and SF 6 . Table 1 summarizes the sequence of the etching processes inside the chamber and the gas mixtures.…”

Section: Etching System and Sequencementioning

confidence: 99%

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Loss reduction in silicon nanophotonic waveguide micro-bends through etch profile improvement

Selvaraja

Bogaerts

Thourhout

2011

Optics Communications

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Single mode silicon photonic wire waveguides allow low-loss sharp micro-bends, which enables compact photonic devices and circuits. The circuit compactness is achieved at the cost of loss induced by micro-bends, which can seriously affect the device performance. The bend loss strongly depends on the bend radius, polarization, waveguide dimension and profile. In this paper, we present the effect of waveguide profile on the bend loss. We present waveguide profile improvement with optimized etch chemistry and the role of etch chemistry in adapting the etch profile of silicon is investigated. We experimentally demonstrate that by making the waveguide sidewalls vertical, the bend loss can be reduced up to 25% without affecting the propagation loss of the photonic wires. The bend loss of a 2 µm bend has been reduced from 0.039dB/90 o bend to 0.028dB/90 o bend by changing the sidewall angle from 81 o to 90 o respectively. The propagation loss of 2.7 ± 0.1dB/cm and 3 ± 0.09dB/cm was observed for sloped and vertical photonic wires respectively was obtained.

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“…First of all, it has a high refractive index contrast permitting very compact sensors of which many can be incorporated on a single chip, enabling multiplexed sensing. Secondly, silicon-on-insulator photonic chips can be made using CMOS-compatible process steps, allowing for a strong reduction of the chip cost by high volume fabrication [2]. These sensor chips can therefore be disposable, meaning that the chip is only used once, avoiding complex cleaning of the sensor surface after use, which is required to avoid cross contamination when used for medical diagnostics.…”

Section: Introductionmentioning

confidence: 99%

Silicon photonic sensors incorporated in a digital microfluidic system

et al. 2012

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Label-free biosensing with silicon nanophotonic microring resonator sensors has proven to be an excellent sensing technique for achieving high-throughput and high sensitivity, comparing favorably with other labeled and label-free sensing techniques. However, as in any biosensing platform, silicon nanophotonic microring resonator sensors require a fluidic component which allows the continuous delivery of the sample to the sensor surface. This component is typically based on microchannels in PDMS or other materials which add cost and complexity to the system. The use of microdroplets in a digital microfluidic system, instead of continuous flows, is one of the recent trends in the field, where micro-to picoliter-sized droplets are generated, transported, mixed and split, thereby creating miniaturized reaction chambers which can be controlled individually in time and space. This avoids cross-talk between samples or reagents and allows fluid plugs to be manipulated on reconfigurable paths, which cannot be achieved using the more established and more complex technology of microfluidic channels where droplets are controlled in series. It has great potential for high-throughput liquid handling, while avoiding on-chip cross contamination.We present the integration of two miniaturized technologies: label-free silicon nanophotonic microring resonator sensors and digital microfluidics, providing an alternative to the typical microfluidic system based on microchannels. The performance of this combined system is demonstrated by performing proof-of-principle measurements of glucose, sodium chloride and ethanol concentrations. These results show that multiplexed real-time detection and analysis, great flexibility, and portability make the combination of these technologies an ideal platform for easy and fast use in any laboratory.

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Fabrication of Photonic Wire and Crystal Circuits in Silicon-on-Insulator Using 193-nm Optical Lithography

Cited by 207 publications

References 21 publications

Measurement of small molecule diffusion with an optofluidic silicon chip

Measurement of small molecule diffusion with an optofluidic silicon chip

Loss reduction in silicon nanophotonic waveguide micro-bends through etch profile improvement

Silicon photonic sensors incorporated in a digital microfluidic system

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