2007
DOI: 10.1364/oe.15.012088
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Fabrication of plastic microlens arrays using hybrid extrusion rolling embossing with a metallic cylinder mold fabricated using dry film resist

Abstract: This paper reports a novel and effective method to fabricate microlens arrays on polycarbonate films by hybrid extrusion rolling embossing. The metallic cylinder mold bearing an array of micro-holes is fabricated using photolithography with dry film resist. During the extrusion rolling embossing process, the extruded PC film is immediately pressed against the surface of the roller mold. Under the influence of the rolling pressure and surface tension, an array of convex microlenses is formed. The uniformity and… Show more

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Cited by 58 publications
(26 citation statements)
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“…Lithography is a well-established technique, particularly for patterning microstructured silicon wafer. In the case of a lens array pattern, different processes (Chen et al, 2008;Jiang et al, 2007;Pan et al, 2004) can be used to create a smooth surface. High-aspect-ratio features can be produced on a resist polymer using X-ray lithography and deep UV lithography.…”
Section: Micromold Makingmentioning
confidence: 99%
“…Lithography is a well-established technique, particularly for patterning microstructured silicon wafer. In the case of a lens array pattern, different processes (Chen et al, 2008;Jiang et al, 2007;Pan et al, 2004) can be used to create a smooth surface. High-aspect-ratio features can be produced on a resist polymer using X-ray lithography and deep UV lithography.…”
Section: Micromold Makingmentioning
confidence: 99%
“…Many microplastic imprinting processes can be applied to micropatterns including microdispensing combined with a hot imprinting process [13], UV molding [14], hybrid extrusion rolling imprinting [15], gas-assisted imprinting [16], and microelectrical discharge machining combined with a hot imprinting process [17, 18]. The nanoimprinting process has attracted attention from fabricating because it is applied to mass-produce nanostructure products at low costs and high production rates.…”
Section: Introductionmentioning
confidence: 99%
“…Kim and Kim (2011) studied a novel fabrication process of micro-patterning on a roller surface by applying the photolithography process. Jiang et al (2007) could duplicate the average diameter of 210 and a 12 μm-deep micro-lens array on the surface of a thin polymer plate using hybrid extrusion rolling embossing. Ahn and Guo (2008) studied high-speed roll-to-roll nanoimprint lithography on flexible plastic substrates and found the stamp force was small and uniform.…”
Section: Introductionmentioning
confidence: 99%