Fabrication of pyramid shaped three-dimensional 8×8 electrodes for artificial retina

Koo, Kyo‐in; Chung, Hum; Yu, Young Suk; Seo, Jong-Mo; Park, Jaehong; Lim, Jeong Hoon; Paik, Seung-Joon; Park, Sung-Il; Choi, Hyun Min; Jeong, Myoung-Jun; Kim, Gil Sub; Cho, Dong‐il Dan

doi:10.1016/j.sna.2005.11.070

Cited by 19 publications

(10 citation statements)

References 5 publications

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“…Finally, the electrodes and pads are exposed from the silicon nitride layer by reactive ion etching. The fabrication of 3D MEA shares the design idea of planar MEA [ 35 , 36 ].…”

Section: Principles Of Electrochemical Cell-based Biosensorsmentioning

confidence: 99%

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Microfabricated Electrochemical Cell-Based Biosensors for Analysis of Living Cells In Vitro

Wang

et al. 2012

Biosensors

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Cellular biochemical parameters can be used to reveal the physiological and functional information of various cells. Due to demonstrated high accuracy and non-invasiveness, electrochemical detection methods have been used for cell-based investigation. When combined with improved biosensor design and advanced measurement systems, the on-line biochemical analysis of living cells in vitro has been applied for biological mechanism study, drug screening and even environmental monitoring. In recent decades, new types of miniaturized electrochemical biosensor are emerging with the development of microfabrication technology. This review aims to give an overview of the microfabricated electrochemical cell-based biosensors, such as microelectrode arrays (MEA), the electric cell-substrate impedance sensing (ECIS) technique, and the light addressable potentiometric sensor (LAPS). The details in their working principles, measurement systems, and applications in cell monitoring are covered. Driven by the need for high throughput and multi-parameter detection proposed by biomedicine, the development trends of electrochemical cell-based biosensors are also introduced, including newly developed integrated biosensors, and the application of nanotechnology and microfluidic technology.

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“…Finally, the electrodes and pads are exposed from the silicon nitride layer by reactive ion etching. The fabrication of 3D MEA shares the design idea of planar MEA [ 35 , 36 ].…”

Section: Principles Of Electrochemical Cell-based Biosensorsmentioning

confidence: 99%

Section: Applications In Biochemical Monitoring Of Living Cellsmentioning

confidence: 99%

Microfabricated Electrochemical Cell-Based Biosensors for Analysis of Living Cells In Vitro

Wang

et al. 2012

Biosensors

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“…22 Designing an implant that uses less current to elicit a response is important as high current injection could be problematic in terms of tissue heating and damage over time. To address this distance issue some groups are testing devices with spine electrodes that penetrate into the retina 74,[87][88][89][90] This technique may be most useful for implants placed in the subretinal, suprachoroidal or episcleral space, so that they can deliver enough current to stimulate the ganglion cells. Manufacturing capability will be a determining factor for the development of electrodes that penetrate into the retina, as these electrodes would need to be much smaller (tips approximately one to 10 mm © 2012 The Authors in diameter) than currently available surface electrodes (100 to 400 mm).…”

Section: Performancementioning

confidence: 99%

Electronic restoration of vision in those with photoreceptor degenerations

O'Brien

Greferath

Vessey

et al. 2012

Clinical and Experimental Optometry

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“…d 〈110〉 direction at Si{111} wafer surface with primary flat oriented along 〈110〉 direction. Three {111} planes ( • ) are 109.5º to the surface plane and are 60º to each other, while another three {111} planes ( ○ ) are 70 [19][20][21][22][23][24][25][26][27][28][29][30][31][32][33][34]. In these structures, gap between freestanding structure and bottom surface can be controlled precisely.…”

Section: Introductionmentioning

confidence: 99%

Determination of precise crystallographic directions on Si{111} wafers using self-aligning pre-etched pattern

Rao

Swarnalatha

Pandey

et al. 2018

Micro and Nano Syst Lett

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Silicon wet anisotropic etching based bulk micromachining technique is widely used for the fabrication of microelectromechanical systems components. In this technique of microfabrication, alignment of mask edges with crystallographic directions plays a crucial role to avoid unwanted undercutting to control the dimensions of fabricated structures. Various kinds of pre-etched designs have been reported to identify the crystallographic directions (e.g. 〈110〉 and 〈100〉) on Si{100} and Si{110} wafer surfaces. To the best of our knowledge, no pre-etched design has been reported to identify crystal directions on Si{111} wafer. In this work, a self-aligning technique based on pre-etched patterns has been investigated to precisely determine the 〈110〉 direction on Si{111} wafer surface. In this technique, a set of circular shape mask patterns close to wafer edge are etched for the identification of 〈110〉 direction. On wet anisotropic etching these patterns transform to hexagonal shapes. The notches of hexagonal patterns align precisely along a straight line only when they lie on exact 〈110〉 direction. The self-aligned notches can easily be identified by visual inspection using an optical microscope. The major advantages of this technique are simplicity, precision, and self-alignment. In addition, the pre-etched patterns at the wafer periphery occupy very less place.

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Fabrication of pyramid shaped three-dimensional 8×8 electrodes for artificial retina

Cited by 19 publications

References 5 publications

Microfabricated Electrochemical Cell-Based Biosensors for Analysis of Living Cells In Vitro

Microfabricated Electrochemical Cell-Based Biosensors for Analysis of Living Cells In Vitro

Electronic restoration of vision in those with photoreceptor degenerations

Determination of precise crystallographic directions on Si{111} wafers using self-aligning pre-etched pattern

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