Fabrication of PZT nano dot array and their ferroelectric properties

Abstract

This paper demonstrates a promising and low-cost method for fabricating PZT nano-dot array by using sol-gel template method combined with laser interference lithography. ZrO 2 template with the pitch of 1 lm is firstly fabricated by sol-gel method and laser interference with a 325 nm He-Cd laser. Afterwards, PZT nano dot array with diameter of 500 nm and thickness of 20 nm is prepared on the ZrO 2 template. Atomic force microscope results show that the PZT nano dot array is uniform and highly ordered. Ferroelectric properties of PZT nano dot array are in situ measured through online-operation of TF analyzer and AFM. A ferroelectric hysteresis loop is obtained for the PZT nano dot.

Preparation of an Inorganic All-Solid-State Electrochromic Device with Excellent Open-Circuit Memory

“…In this way, an inorganic all-solid-state ECD with the “ITO/TiO 2 /ZrO 2 /sodium phosphate glass/ZrO 2 /NiO/ITO” structure was constructed. The preparation methods of ZrO 2 , TiO 2 , NiO, and ITO sols were described in detail in refs − , respectively.…”

Fundamental formulations and recent achievements in piezoelectric nano-structures: a review

“…By using the sol-gel template method combined with laser interference lithography, a PZT nano-dot array was fabricated, and the material characterization was briey discussed. 122 (Bi 0.5 Na 0.5 )TiO 3 doped with 8 mol% BaTiO 3 (BNT-BT 0.08 ) nanopowder with average particle size of 30 nm was prepared by an acetate-alkoxide sol-gel method. 123 (Na 0.5 Bi 0.5 ) 0.94 Ba 0.06 TiO 3 piezoelectric ceramics 124 and 0.4 mm thick Pb(Zr,Ti)O 3 lms 125 were also synthesized by the sol-gel technique.…”

“…Most recently, researchers have attempted to transfer piezoelectric nanoribbons and nanolms, for example, PZT and BaTiO 3 materials, onto exible substrates for the purpose of utilizing the high electromechanical coupling of piezoelectric materials in conformable energy harvesting. Only some two-dimensional PNs have been proposed in recent years, i.e., PZT nanolms, 78,79 ZnO nanolms, 38,80 P(VDF-TrFE)alumina nano-lms, 27,81,82 BaTiO 3 nanolms, 83 and PZT ribbons. 84,85 Due to the high roughness factor and the large areas of exposed polar basal planes, the two-dimensional PNs show enhanced photocatalytic properties for decomposition of volatile organic compounds in comparison with common 1D nanowire arrays.…”

Top-down patterning and self-assembly of flower-like gold arrays for surface enhanced Raman spectroscopy

“…Specifically, the patterned TiO 2 microstructure was prepared by photosensitive sol-gel, which make the TiO 2 films with photosensitive properties through chelating the metal alkoxide titanium tetrabutoxide monomer (Ti(O(CH 2 ) 3 CH 3 ) 4 : Ti(O-n-Bu) 4 ) with the chemical modifier benzoylacetone (C 6 H 5 COCH 2 COCH 3 : BzAcH). The major advantage of this approach is that you can obtained inorganic or organic-inorganic composited materials microstructures even nanostructures with different sizes simply and rapidly by photo lithography but not using photoresist as sensitive medium [18][19][20]. At the same time, the flower-like Au arrays prepared by self-assembly and electrochemical reaction can grow tightly on the substrate and importantly show strong SERS effect.…”