Fabrication of Relaxer-Based Piezoelectric Energy Harvesters Using a Sacrificial Poly-Si Seeding Layer

Abstract

The effect of a polycrystalline silicon (poly-Si) seeding layer on the properties of relaxor Pb(Zr 0.53 ,Ti 0.47 )O 3 -Pb(Zn 1/3 ,Nb 2/3 )O 3 (PZT-PZN) thin films and energy-harvesting cantilevers was studied. We deposited thin films of the relaxor on two substrates, with and without a poly-Si seeding layer. The seeding layer, which also served as a sacrificial layer to facilitate cantilever release, was found to improve morphology, phase purity, crystal orientation, and electrical properties. We attributed these results to reduction of the number of nucleation sites and, therefore, to an increase in relaxor film grain size. The areal power density of the wet-based released harvester was measured. The power density output of the energy harvester with this relaxor composition and the poly-Si seeding layer was 325 lW/cm 2 .

Structural and Piezoelectric Properties of (1−x)Pb(Zr1−yTiy)O3–xPb(Zn0.4Ni0.6)1/3Nb2/3O3 Ceramics Near Triple Point

“…Many studies have been conducted to develop new piezoelectric ceramics for applications in piezoelectric harvesters and multilayer devices . In particular, the (1− x )Pb(Zr 1− y Ti y )O 3 ‐ x Pb(Zn 0.4 Ni 0.6 ) 1/3 Nb 2/3 O 3 ceramics have been extensively investigated for such applications because of their large d 33 value and relatively small ε 33 / ε o value .…”

Perovskite Relaxor‐Dependent Contributions to Piezoelectric Power Generation of Multiple PZT Tape‐Based Cantilever Structures at Nonresonant Frequency

“…As seen in the plot of output power versus resonant frequency in Figure 5a, our power values achieved in the Type I harvesters were compared with the values reported for the unimorph or bimorph cantilevers based on PZT or relaxor-PZT materials. [25,[27][28][29][30]49,[51][52][53][54][55][56][57][58] All corresponding values with information on the sample dimensions and measurement conditions are presented in Table S4 (Supporting Information). Most of the reported studies were based on the results measured at vibrational resonant frequency greater than 70 Hz.…”

The effect of poling conditions on the performance of piezoelectric energy harvesters fabricated by wet chemistry

“…11 The relaxor PZT-PZN thin lms (0.810 mm thick) were then deposited on top of the TiO 2 layer and crystallized at 675 C for 30 min in air to obtain phase-pure relaxor lms. 10,11,19 The patterning, wet etching, and cantilever release steps were carried out in a class 1000 clean room. The rst photolithography step involved patterning of 50 nm RuO 2 /40 nm Cr/400 nm Au interdigitated electrodes (IDEs).…”