Fabrication of Sapphire Micro Optics by F2-Laser Ablation

The microhardness of a thin aluminum oxide film with a thickness of 80 to 240 nm on the surface of a lithium niobate single crystal was determined by the method of nanoindentation. The hardness and Young’s modulus for a film deposited by dc-magnetron sputtering of an aluminum target in a gas (Ar+O2) medium were more than 30 GPa and 300 GPa, respectively. The dependences of the film thickness on the mechanical properties of a layered system, in particular hardness and elastic modulus, were established.

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Fabrication of Sapphire Micro Optics by F2-Laser Ablation

Cited by 2 publications

References 9 publications

Sapphire surface patterning using femtosecond laser micromachining

Sapphire surface patterning using femtosecond laser micromachining

Study of the mechanical characteristics of the Al₂O₃ film on the LiNbO₃ substrate

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Fabrication of Sapphire Micro Optics by F2-Laser Ablation

Cited by 2 publications

References 9 publications

Sapphire surface patterning using femtosecond laser micromachining

Sapphire surface patterning using femtosecond laser micromachining

Study of the mechanical characteristics of the Al2O3 film on the LiNbO3 substrate

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Study of the mechanical characteristics of the Al₂O₃ film on the LiNbO₃ substrate