Fabrication of sealed nanofluidic channels using site-selective direct write (maskless) X-ray lithography

Leontowich, Adam F. G.; Hitchcock, Adam P.

doi:10.1007/s10404-013-1170-4

Cited by 2 publications

(1 citation statement)

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“…This study proposes a low-cost, large-surface nano-mold fabrication technique for linear nanochannels. Nanochannels of linear geometry are the ones most frequently used in nanofluidic devices 13 38 39 40 . They have become crucial devices with a wide variety of biological and chemical applications such as rapid analysis of elegans chemotaxis 41 , protein analysis 9 10 , ion separation 15 16 , DNA stretching and mapping 11 12 13 , as well as in energy absorption systems 17 18 .…”

Section: Resultsmentioning

confidence: 99%

A novel 2D silicon nano-mold fabrication technique for linear nanochannels over a 4 inch diameter substrate

Yin

Zou

et al. 2016

Sci Rep

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A novel low-cost 2D silicon nano-mold fabrication technique was developed based on Cu inclined-deposition and Ar+ (argon ion) etching. With this technique, sub-100 nm 2D (two dimensional) nano-channels can be etched economically over the whole area of a 4 inch n-type <100> silicon wafer. The fabricating process consists of only 4 steps, UV (Ultraviolet) lithography, inclined Cu deposition, Ar+ sputter etching, and photoresist & Cu removing. During this nano-mold fabrication process, we investigated the influence of the deposition angle on the width of the nano-channels and the effect of Ar+ etching time on their depth. Post-etching measurements showed the accuracy of the nanochannels over the whole area: the variation in width is 10%, in depth it is 11%. However, post-etching measurements also showed the accuracy of the nanochannels between chips: the variation in width is 2%, in depth it is 5%. With this newly developed technology, low-cost and large scale 2D nano-molds can be fabricated, which allows commercial manufacturing of nano-components over large areas.

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Section: Resultsmentioning

confidence: 99%

A novel 2D silicon nano-mold fabrication technique for linear nanochannels over a 4 inch diameter substrate

Yin

Zou

et al. 2016

Sci Rep

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Cryo scanning transmission x-ray microscope optimized for spectrotomography

Leontowich

Berg

Regier

et al. 2018

Review of Scientific Instruments

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A cryo scanning transmission X-ray microscope, the cryo-STXM, has been designed and commissioned at the Canadian Light Source synchrotron. The instrument is designed to operate from 100 -4000 eV (λ = 12.4 -0.31 nm). Users can insert a previously frozen sample, through a load lock, and rotate it ±70° in the beam to collect tomographic data sets. The sample can be maintained for extended periods at 92 K primarily to suppress radiation damage, and a pressure on the order of 10 -9 Torr to suppress sample contamination. The achieved spatial resolution (30 nm) and spectral resolution (0.1 eV) are similar to other current soft X-ray STXMs, as demonstrated by measurements on known samples and test patterns. The data acquisition efficiency is significantly more favorable for both imaging and tomography. 2D images, 3D tomograms and 4D chemical maps of automotive hydrogen fuel cell thin sections are presented Introduction:Scanning transmission X-ray microscopy (STXM) is an established imaging technique for investigating the structure and composition of matter at the micro-to nanometer length scale.Briefly, in STXM an X-ray beam is focused down to a small spot onto a sample using optics such as a zone plate (ZP) lens or Kirkpatrick-Baez (KB) mirrors [1-3]. Two dimensional images are compiled from a series of line scans, performed by scanning the sample downstream of the optic(s), or by scanning the optic(s) upstream of the sample. Modern soft X-ray STXMs, such as the ambient-STXM at the Canadian Light Source (CLS, Saskatoon, Canada) spectromicroscopy (SM) beamline 10ID-1 [4], acquire images of sub-micrometer thick specimens with a bright field spatial resolution that is close to diffraction limited [5]: 30 nm half pitch is now considered routine at most facilities. When a STXM is combined with a soft X-ray beamline at a synchrotron, spectromicroscopy is enabled [2]. The focused beam can be held at one spatial location while the photon energy is scanned to perform X-ray absorption near edge spectroscopy (XANES) on a small volume [2]. More often, a series of monochromatic images over a photon energy range of interest is collected, and each pixel in the resulting "image stack" contains a XANES spectrum [6]. Image stacks can be converted into quantitative chemical maps using thickness normalized reference spectra [2]. Soft X-ray STXMs have found applications in diverse fields such as human health [7], agriculture [8], environmental studies [9], nanofabrication [10], and advanced materials [11].The overall form and function of current ZP based STXMs can be traced back to instruments built in the 1980s at the National Synchrotron Light Source (NSLS, Brookhaven National Laboratory, USA) [12,13]. A concise timeline of instrumentation developments from around the

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Fabrication of sealed nanofluidic channels using site-selective direct write (maskless) X-ray lithography

Cited by 2 publications

References 41 publications

A novel 2D silicon nano-mold fabrication technique for linear nanochannels over a 4 inch diameter substrate

A novel 2D silicon nano-mold fabrication technique for linear nanochannels over a 4 inch diameter substrate

Cryo scanning transmission x-ray microscope optimized for spectrotomography

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