Fabrication of Seamless Roller Mold for Continuous Roller Imprinting of Microlens Array Films

Continuous roller nanoimprinting: next generation lithography

“…To solve these problems, curve surface lithography processing can be applied. 32,39,40 As shown in Fig. 2c, 40 a uniform photoresist can be obtained on the smooth metal roller surface by controlling the air pressure, airflow, and spin coating speed.…”

Recent progress in fabrication methods for micro structures on optical thin film

“…Li等人 [70] 基于电 毛细力原理开发的UV固化成形设备可用于成形高度 在空间呈不同分布的微柱阵列, 微柱深宽最高比可 特邀评述 图 6 (网络版彩色)辊子模具加工方法. (a) 单点金刚石车床直接加工 [68] ; (b) 旋转光刻法 [69] Figure 6 (Color online) Fabrication methods of roller mold. (a) Single crystalline diamond turning method [68] ; (b) step-and-rotated UV-exposure method [69] 达10:1以上, 通过调节电压可以改变UV胶的润湿角, 从而改变驱动力大小并实现不同高度微柱结构的加 工. Weng等人 [71] 开发出电磁场辅助的UV固化成形设 备, 指出在电磁场辅助作用下的成形可以获得更高 精度和更高效率.…”

Diamond machining of freeform-patterned surfaces on precision rollers

“…Manufacturing of the precision rollers, a key component of the R2R system, is critical for the R2R industry. Precision machining of such rollers has been demonstrated using beam pen lithography [13], combining of cylindrical photolithography, isotropic chemical etching, electropolishing methods [14], femtosecond laser exposure and the chemical wet-etching process [15], and the UV micro-stamping method [11]. However, most of these methods require expensive and complex manufacturing processes.…”