Fabrication of self-standing nanowires, nanodendrites, and nanofractal-like trees on insulator substrates with an electron-beam-induced deposition

Song, Minghui; Mitsuishi, Kazutaka; Tanaka, Miyoko; Takeguchi, Masaki; Shimojo, Makoto; Furuya, Kazuo

doi:10.1007/s00339-004-2997-z

Cited by 28 publications

(31 citation statements)

References 28 publications

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“…Tungsten hexacarbonyl (W(CO) 6 ) powder was used as a precursor, of which the vapor pressure is approximately 2 Pa at room temperature. The precursor has been proved to be suitable for fabricating nano-sized structures on conductive substrates 1,3,5,7) as well as on insulator substrates 9,10) with EBID. Crystalline SiO 2 thinfilm specimens suitable for TEM observation were used as substrates.…”

Section: Methodsmentioning

confidence: 99%

Fabrication of Free-Standing Tungsten-Nanowhiskers on SiO<SUB>2</SUB> Substrates with Electron-Beam Induced Deposition

2007

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Free-standing tungsten-nanowhiskers about 3 nm in thickness were fabricated on SiO 2 substrates with electron-beam induced deposition in a transmission electron microscope operated at 400 kV at room temperature. The growth process of the nanowhisker was observed in-situ and analyzed. The nanowhisker was characterized with high-resolution transmission electron microscopy. Nucleus-deposits smaller than 1 nm formed on the surface of the substrate, grew to 2$3 nm and then grew out of the surface to form nanowhiskers under the electron irradiation. The nanowhisker grew long at its tip. The density and growth rate of the nanowhiskers were different at different places of the same substrate. A part of the nanowhiskers grew long to about 20 nm at the electron dose of 1:16 Â 10 25 e m À2 for an irradiation time of 223 s. The nanowhisker contained nanometer-sized grains of body-centred cubic structural tungsten and an amorphous part. It was found that there exists a critical size about 2-3 nm for a nucleus to grow to a nanowhisker. It is suggested that the nucleation site of the nanowhisker may be controlled by putting appropriate conductive particles in the critical size on the surface of an insulator substrate.

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Section: Methodsmentioning

confidence: 99%

Fabrication of Free-Standing Tungsten-Nanowhiskers on SiO<SUB>2</SUB> Substrates with Electron-Beam Induced Deposition

2007

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“…As the electron beam can be focused onto a region of one nanometer to several hundred nanometers using a modern electron microscope, a solid deposit is formed in the irradiated regions on the surface of the substrate. Schematic illustrations of the experimental setup for EBID are shown in figure 1 and the details of the experiments are given elsewhere [14][15][16][17][18][19]. For example, when the vapor of tungsten hexacarbonyl (W(CO) 6 )is used as a precursor gas, the electron irradiation decomposes the gas into W, CO, C, O and various molecular species.…”

Section: Experiments On Electron-beam-induced Depositionmentioning

confidence: 99%

“…Although the growth of carbon fractal-like structures has already been observed on insulator substrates under electron-beam irradiation due to the existence of pump oil remaining in the atmosphere of the vacuum chamber [21][22][23], EBID using insulator substrates was first reported by Song et al [17]. Thin films of Al 2 O 3 [17][18][19][24][25][26] and SiO 2 [27][28][29][30] were irradiated by an electron beam in TEMs with organometallic precursor gases at room temperature.…”

Section: Growth Of Nanostructures On Insulators By Ebidmentioning

confidence: 99%

“…Thin films of Al 2 O 3 [17][18][19][24][25][26] and SiO 2 [27][28][29][30] were irradiated by an electron beam in TEMs with organometallic precursor gases at room temperature. Figure 2(a) shows a micrograph of the initial stage of the growth of nanostructures under a current density of about 0.75 A cm −2 .…”

Section: Growth Of Nanostructures On Insulators By Ebidmentioning

confidence: 99%

“…A further increase in the current density to 33.0 A cm −2 resulted in extensive branching and the formation of complicated nanotree structures. It is concluded that the growth from nanorods to nanodendrites and then nanotrees can be controlled by the intensity of the electron beam [17,25]. Figure 3(a) shows nanodendrites grown on a SiO 2 substrate with an electron-beam accelerating voltage of 400 kV and a fluence of 6.0 × 10 21 e cm −2 [30].…”

Section: Growth Of Nanostructures On Insulators By Ebidmentioning

confidence: 99%

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Nanofabrication by advanced electron microscopy using intense and focused beam^∗

Furuya

2008

Science and Technology of Advanced Materials

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The nanogrowth and nanofabrication of solid substances using an intense and focused electron beam are reviewed in terms of the application of scanning and transmission electron microscopy (SEM, TEM and STEM) to control the size, position and structure of nanomaterials. The first example discussed is the growth of freestanding nanotrees on insulator substrates by TEM. The growth process of the nanotrees was observed in situ and analyzed by high-resolution TEM (HRTEM) and was mainly controlled by the intensity of the electron beam. The second example is position-and size-controlled nanofabrication by STEM using a focused electron beam. The diameters of the nanostructures grown ranged from 4 to 20 nm depending on the size of the electron beam. Magnetic nanostructures were also obtained using an iron-containing precursor gas, Fe(CO) 5 . The freestanding iron nanoantennas were examined by electron holography. The magnetic field was observed to leak from the nanostructure body which appeared to act as a 'nanomagnet'. The third example described is the effect of a vacuum on the size and growth process of fabricated nanodots containing W in an ultrahigh-vacuum field-emission TEM (UHV-FE-TEM). The size of the dots can be controlled by changing the dose of electrons and the partial pressure of the precursor. The smallest particle size obtained was about 1.5 nm in diameter, which is the smallest size reported using this method. Finally, the importance of a smaller probe and a higher electron-beam current with atomic resolution is emphasized and an attempt to develop an ultrahigh-vacuum spherical aberration corrected STEM (Cs-corrected STEM) at NIMS is reported.

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A Review on Direct‐Write Nanoprinting of Functional 3D Structures with Focused Electron Beams

Reisecker,

Winkler,

Plank

2024

Adv Funct Materials

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Following Moore`s law, the performance of devices should double within a two‐year span, which can either be done by reducing the size of the individual components or adapting the working mechanism. In most cases the same mantra applies – pushing the size while keeping the quality. As manufacturing techniques are approaching the atomic scale, however, miniaturization reaches its intrinsic limit, shifting focus toward higher‐dimensional architectures realized by stacking planar layers or fabricating true, free‐standing nanostructures. A mask‐less, additive manufacturing technique with the capability to produce such 3D structures at the nanoscale is called Focused Electron Beam Induced Deposition (FEBID). Applying a focused electron beam in a conventional scanning electron microscope together with a gaseous metal‐precursor gives access to a vast library of complex, 3D nanostructures, which exhibit feature sizes down to the 10 nm‐range and can be printed in a single step on most substrates. This review aims at introducing the technique to a broader scientific community, breaking down the most important processing routes and highlighting disciplines explored so far ranging from nanooptics and nanomagnetism, over scanning probes and field emitters to sensing and particle trapping. Finally, a future roadmap of the technique is discussed, and prospective research focus identified.

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Fabrication of self-standing nanowires, nanodendrites, and nanofractal-like trees on insulator substrates with an electron-beam-induced deposition

Cited by 28 publications

References 28 publications

Fabrication of Free-Standing Tungsten-Nanowhiskers on SiO<SUB>2</SUB> Substrates with Electron-Beam Induced Deposition

Fabrication of Free-Standing Tungsten-Nanowhiskers on SiO<SUB>2</SUB> Substrates with Electron-Beam Induced Deposition

Nanofabrication by advanced electron microscopy using intense and focused beam^∗

A Review on Direct‐Write Nanoprinting of Functional 3D Structures with Focused Electron Beams

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Fabrication of self-standing nanowires, nanodendrites, and nanofractal-like trees on insulator substrates with an electron-beam-induced deposition

Cited by 28 publications

References 28 publications

Fabrication of Free-Standing Tungsten-Nanowhiskers on SiO<SUB>2</SUB> Substrates with Electron-Beam Induced Deposition

Fabrication of Free-Standing Tungsten-Nanowhiskers on SiO<SUB>2</SUB> Substrates with Electron-Beam Induced Deposition

Nanofabrication by advanced electron microscopy using intense and focused beam∗

A Review on Direct‐Write Nanoprinting of Functional 3D Structures with Focused Electron Beams

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Product

Resources

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Nanofabrication by advanced electron microscopy using intense and focused beam^∗