Fabrication of SHF range SAW devices on AlN/Diamond-substrate

Omori, Tatsuya; Kobayashi, Atsushi; Takagi, Yutaka; Hashimoto, Ken–ya; Yamaguchi, M.

doi:10.1109/ultsym.2008.0048

Cited by 11 publications

(7 citation statements)

References 8 publications

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“…Utilizing highvelocity acoustic waves is one of the promising techniques of overcoming the frequency limit; therefore, above 3 GHz acoustic wave devices using high-velocity SAWs have been studied extensively. [1][2][3][4][5][6][7] Longitudinal leaky SAWs (LLSAWs) on LiNbO 3 and LiTaO 3 substrates are known to exhibit a much higher velocity than a Rayleigh wave on a 128°YX LiNbO 3 substrate and a share horizontal (SH) leaky wave on 36°-48°YX LiTaO 3 substrates. 8,9) However, it is also well known that significant deterioration of device performance is inherent owing to the leakage of the LLSAW energy into the bulk during its propagation.…”

Section: Introductionmentioning

confidence: 99%

3.5 GHz longitudinal leaky surface acoustic wave resonator using a multilayered waveguide structure for high acoustic energy confinement

Kimura

Kishimoto

Omura

et al. 2018

Jpn. J. Appl. Phys.

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In this paper, the use of a structure comprising a thin LiNbO3 plate and a multilayered acoustic mirror composed of SiO2 and Pt for high-performance longitudinal leaky surface acoustic wave (LLSAW) device is proposed. The mirror is expected to offer a much higher reflectivity than that composed of SiO2 and AlN, which the authors proposed previously. The field distribution of these structures is calculated by using a finite element method. It is shown that the acoustic wave energy of the proposed structure is well confined in the vicinity of the top surface, and that leakage to the substrate is reduced. A one-port resonator is fabricated on the structure and its performance characteristics are evaluated. Owing to a high phase velocity of 6,035 m/s, which is about 1.5 times higher than that of conventional SAWs, a large impedance ratio of 71 dB was achieved at 3.5 GHz in addition to a large fractional bandwidth of 9.5%.

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Section: Introductionmentioning

confidence: 99%

3.5 GHz longitudinal leaky surface acoustic wave resonator using a multilayered waveguide structure for high acoustic energy confinement

Kimura

Kishimoto

Omura

et al. 2018

Jpn. J. Appl. Phys.

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“…So far, a few groups have reported on piezo-actuated diamond micro-devices fabricated by the deposition of piezoelectric layers on either polished or on as-grown diamond thin films, e.g., for surface acoustic waves filters and RF resonators [8][9][10], along with unimorph cantilevers [11]. The drawbacks of fabrication approaches used are either the necessity to deposit thick diamond films of several micrometres or a costly polishing step.…”

Section: Introductionmentioning

confidence: 99%

Enhanced mechanical performance of AlN/nanodiamond micro-resonators

Heidrich¹,

Iankov²,

Hees³

et al. 2013

J. Micromech. Microeng.

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Micro electromechanical systems are a matter of intense research pursuing to replace silicon and III–V semiconductor-based components in prospective radio frequency communication devices. Due to their unique material properties, microstructures combining doped nano-crystalline diamond (NCD) and AlN thin films are promising for piezo-actuated microsystems in order to increase operating frequencies. In this work, single and doubly clamped unimorph NCD-on-AlN micro-resonators were fabricated and then characterized by laser vibrometry towards their flexural resonant frequencies in the range of 0.1–20 MHz to deduce their mechanical properties. Enhancements in the structural properties of an AlN piezo-actuator united with an advanced elasticity of nano-diamond electrode lead to superior mechanical parameters of the resulting unimorphs. These allow for the fabrication of flexural resonant microsystems with a potential to extend the operating frequencies well above 1 GHz.

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“…Commonly used piezoelectric materials in classical SAW applications are ST-cut quartz and lithium niobate. Besides them ZnO, AlGaN, GaN, AlN are used [Zaki et al, 2006;Rufer et al, 2006;Assouar et al, 2000;Rufer et al, 2005;Kirsch et al, 2006;Kirsch et al, 2007;Omori et al, 2008]. Recently, multilayered substrates are used for the wave velocity increase [Ahmadi et al, 2004].…”

Section: Introductionmentioning

confidence: 99%