In this paper, the influence of surface oxide layer of SiC powder on the rheological behavior of its slurry was studied by acid washing, HF etching, and calcination oxidation processes. Zeta potential, particle size, inductively coupled plasma atomic emission spectrometry (ICP‐AES), energy dispersive X‐ray spectroscopy, and viscosity tests indicated the main factor that resulted in high viscosity of slurry is impure ions existing either on the powder surface or in the water phase, rather than the surface oxide layer. After the impure ions are removed, the surface oxide layer formed at a calcination temperature range of 400°C‐750°C does not cause an increase in the slurry viscosity, but contributes to an improvement in the rheological properties of SiC slurry.