Fabrication of Silicon-based Micro Pore Array with Large-area and High Aspect-ratio by Photo-electrochemical Etching

Wen-feng, 吕文峰 L; Bin, 周彬 Zhou; Jiandong, 罗建东 Luo; Jinchuan, 郭金川 Guo

doi:10.3788/gzxb20124102.0228

光子学报

2012

DOI: 10.3788/gzxb20124102.0228

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Fabrication of Silicon-based Micro Pore Array with Large-area and High Aspect-ratio by Photo-electrochemical Etching

吕文峰 L Wen-feng¹,

周彬 Zhou Bin²,

罗建东 Luo Jiandong³

et al.

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Electrolyte diffusion model in macroporous silicon photo-electrochemical etching and its application in macropore diameter control

Chen

Wang

et al. 2018

Journal of Applied Physics

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In photo-electrochemical etching for macroporous silicon, the electrolyte diffusion in the macropore greatly influences the formation of macroporous silicon, especially the etching rate and macropore diameter. In this study, the electrolyte diffusion was investigated systematically. We focused on the establishment of the electrolyte diffusion model and its impact on the etching rate and macropore diameter. By solving the diffusion equation, the electrolyte diffusion model was deduced, which is different from the commonly accepted model. The main difference is that, in the model, the HF concentration at the macropore tip decreases nonlinearly with macropore length. The module can effectively predict the etching rate. Based on this model, the practical method of etching current density adjustment for fabricating high aspect ratio macroporous silicon was proposed. In addition, the samples were fabricated with a constant etching current density and corrected etching current density. The experimental result indicates that the novel electrolyte diffusion model is practical. The finding from this study shows that the adjustment of etching current density based on the electrolyte diffusion model can effectively control the macropore diameter of high aspect ratio macroporous silicon.

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Electrolyte diffusion model in macroporous silicon photo-electrochemical etching and its application in macropore diameter control

Chen

Wang

et al. 2018

Journal of Applied Physics

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show abstract

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Fabrication of Silicon-based Micro Pore Array with Large-area and High Aspect-ratio by Photo-electrochemical Etching

Cited by 1 publication

References 0 publications

Electrolyte diffusion model in macroporous silicon photo-electrochemical etching and its application in macropore diameter control

Electrolyte diffusion model in macroporous silicon photo-electrochemical etching and its application in macropore diameter control

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