2017
DOI: 10.3390/nano7050109
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Fabrication of Silicon Nanobelts and Nanopillars by Soft Lithography for Hydrophobic and Hydrophilic Photonic Surfaces

Abstract: Soft lithography allows for the simple and low-cost fabrication of nanopatterns with different shapes and sizes over large areas. However, the resolution and the aspect ratio of the nanostructures fabricated by soft lithography are limited by the depth and the physical properties of the stamp. In this work, silicon nanobelts and nanostructures were achieved by combining soft nanolithography patterning with optimized reactive ion etching (RIE) in silicon. Using polymethylmethacrylate (PMMA) nanopatterned layers… Show more

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Cited by 18 publications
(11 citation statements)
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“…After forming the relief pattern in the resist, the underlying substrate can then be etched using standard processes ( Al-Abaddi et al, 2012 ). By offering a variety of resist materials with a range of fabrication conditions, NIL can be used to pattern nano-architectures on a variety of substrate materials, including silicon and polymers ( Eom et al, 2015 ; Baquedano et al, 2017 ). Resolutions less than 100 nm and even approaching 2 nm have been achieved using NIL ( Dong et al, 2005b ; Li et al, 2011 ).…”
Section: Technologies To Create Nano-architecturementioning
confidence: 99%
“…After forming the relief pattern in the resist, the underlying substrate can then be etched using standard processes ( Al-Abaddi et al, 2012 ). By offering a variety of resist materials with a range of fabrication conditions, NIL can be used to pattern nano-architectures on a variety of substrate materials, including silicon and polymers ( Eom et al, 2015 ; Baquedano et al, 2017 ). Resolutions less than 100 nm and even approaching 2 nm have been achieved using NIL ( Dong et al, 2005b ; Li et al, 2011 ).…”
Section: Technologies To Create Nano-architecturementioning
confidence: 99%
“…In these calls, one of the key topics has been ‘Solar glasses and encapsulation materials’. The LIMES project addressed several aspects that are relevant for PV cover glasses and investigated optical, 63 mechanical and chemical properties of glass as well as novel thermal toughening methods 97 and also the addition of antireflective and self‐cleaning capabilities to the glass surface 98,99 . The glasses made in laboratory experiments were used for proof‐of‐concept studies by making the 70 × 70 mm PV modules discussed here.…”
Section: Introductionmentioning
confidence: 99%
“…The resist was then covered with the PDMS stamp with the desired pattern and was then pressed between two glasses to obtain a mask. The resist was cured under low-vacuum (desiccator) for 3 h [ 34 ]. All the procedures were extremely easy and cheap and permitted the fabrication of large areas, in our case limited to a size around 1.8 × 1.8 cm 2 for easier handling during experimental measurements.…”
Section: Experimental Processmentioning
confidence: 99%