2013
DOI: 10.2971/jeos.2013.13076
|View full text |Cite
|
Sign up to set email alerts
|

Fabrication of single-mode channel polymer waveguides using vacuum assisted microfluidic soft lithography

Abstract: We report on the fabrication of single-mode channel waveguide structures produced by the vacuum assisted microfluidic soft lithography technique. The soft lithographic technique in conjunction with a specially designed photomask pattern and a synthesized UV curable epoxy resin can result in a high yield, cost-effective method for fabrication of channel waveguides. In particular, the use of the microfluidic technique allows for the production of freestanding high quality single-mode channel waveguides on variou… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
1
0
1

Year Published

2014
2014
2018
2018

Publication Types

Select...
3
3

Relationship

0
6

Authors

Journals

citations
Cited by 6 publications
(2 citation statements)
references
References 10 publications
0
1
0
1
Order By: Relevance
“…Currently, channel optical waveguides are being fabricated with different polymers [4][5][6]. On the other hand, the scientific collaboration between the Integrated Optics and Immunoelectroanalysis laboratories, at University of Oviedo, made possible the fabrication of high quality microchannels in glass substrates, showing walls with negligible roughness (less than k/10) [7,8].…”
Section: Introductionmentioning
confidence: 99%
“…Currently, channel optical waveguides are being fabricated with different polymers [4][5][6]. On the other hand, the scientific collaboration between the Integrated Optics and Immunoelectroanalysis laboratories, at University of Oviedo, made possible the fabrication of high quality microchannels in glass substrates, showing walls with negligible roughness (less than k/10) [7,8].…”
Section: Introductionmentioning
confidence: 99%
“…Em vários centros de pesquisa ao redor do mundo têm sido realizados desenvolvimentos envolvendo guias de onda em óptica integrada utilizando diferentes processos de fabricação tais como: wet etching [39], troca protônica [40,41], litografia leve microfluídico assistida à vácuo [42], troca iônica [43].…”
Section: Dispositivos óPticos Integradosunclassified