Fabrication of single-mode circular optofluidic waveguides in fused silica using femtosecond laser microfabrication

Liu, Zhengming; Xu, Jian; Lin, Zijie; Qi, Jia; Li, Xiaolong; Zhang, Aodong; Lin, Jintian; Chen, Jianfang; Fang, Zhiwei; Song, Yunpeng; Chu, Wei; Cheng, Ya

doi:10.1016/j.optlastec.2021.107118

Cited by 25 publications

(11 citation statements)

References 35 publications

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“…As illustrated in Figure 1b, the laser-modified micropatterns include a 3D microchannel combined with an array of extra-access ports which connected the glass surface and the top of the channel. As previous works demonstrated [24][25][26][27][28], the introduction of extra-access ports provides a more homogeneous etching of the whole channel to beat the limitation of inherently etching selectivity of glass. For the selective chemical etching, a mixed aqueous solution with a concentration of 10 M KOH and 1 M NaOH was used.…”

Section: Fabrication Of 3d Large-scale Glass Microchannelsmentioning

confidence: 99%

“…Previously, to fabricate 3D centimeter-scale high-throughput micromixers in fused silica glass, a new bonding process was developed [23]. To beat the limitation of the etching selectivity, the introduction of extra-access ports was proposed by several groups before [24][25][26][27]. Recently, we have demonstrated that 3D all-glass microfluidic channels with arbitrary lengths can be fabricated using a hybrid laser microfabrication scheme based on a combination of ultrafast laser microfabrication and CO2 laser irradiation of glass [28].…”

Section: Introductionmentioning

confidence: 99%

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Three-Dimensional Large-Scale Fused Silica Microfluidic Chips Enabled by Hybrid Laser Microfabrication for Continuous-Flow UV Photochemical Synthesis

Zhang

et al. 2022

Micromachines

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We demonstrate a hybrid laser microfabrication approach, which combines the technical merits of ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in situ melting for centimeter-scale and bonding-free fabrication of 3D complex hollow microstructures in fused silica glass. With the developed approach, large-scale fused silica microfluidic chips with integrated 3D cascaded micromixing units can be reliably manufactured. High-performance on-chip mixing and continuous-flow photochemical synthesis under UV irradiation at ~280 nm were demonstrated using the manufactured chip, indicating a powerful capability for versatile fabrication of highly transparent all-glass microfluidic reactors for on-chip photochemical synthesis.

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Section: Fabrication Of 3d Large-scale Glass Microchannelsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Three-Dimensional Large-Scale Fused Silica Microfluidic Chips Enabled by Hybrid Laser Microfabrication for Continuous-Flow UV Photochemical Synthesis

Zhang

et al. 2022

Micromachines

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“…In recent years, femtosecond laser has been widely used in the processing of various materials, from soft to hard and brittle materials for its ultra-short pulse width and ultra-high peak power [11,12] . Femtosecond laser are more and more used in the fields of micro/nano fabrication, and have made great achievements in the fields of micromachine [13] , micro-optics [14] , biomedicine [15] . Femtosecond laser interacts with different substances in different mechanisms.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of microlens on fused silica by femtosecond laser combined with wet etching

Cao²,

Chen³

et al. 2023

Advanced Optical Manufacturing Technologies and Applications 2022; And 2nd International Forum of Young Scientists on Advanced

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With the development of the micro/nano machining technology, various devices tend to be miniaturized and lightweight. Micro-optical elements as one of most important devices, for its easy integration and broad functions, has been extensively studied. Microlens have been widely used in the fields of imaging, detection and sensing. In order to enhance the stability and broaden the application environment of the microlens, fabricating the microlens based on hard and brittle materials is necessary. Hard and brittle material different from soft materials, which have high thermal and mechanical stability, and have the ability used in harsh conditions. In this study, we combined femtosecond laser single pulse fabrication with HF wet etching on fused silica to realized concave microlens on fused silica. Moreover, microlens with different focus can be realized by adjusting fabrication parameters. The results indicated that the fabricated microlens have excellent focusing and imaging properties. The femtosecond laser single pulse fabrication assisted with HF wet etching exhibits high flexibility and shows the huge potential of fabrication micro-optical elements on fused silica.

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“…Compared with a solid waveguide device, an optofluidic waveguide is a type of device in which a liquid solution serves as the waveguide core encapsulated in a proper cladding layer, such as a microchannel. By modulating the properties of the liquid solution that fills the microchannel, the optical properties of the waveguide can be flexibly changed, enabling a series of functional photonic devices, such as optofluidic waveguides [ 20 , 21 , 22 , 23 ], optofluidic Mach–Zehnder interferometers [ 24 ], and optofluidic waveguide lasers [ 25 ]. However, the fabrication of a 3D optofluidic SSC structure has not yet been explored.…”

Section: Introductionmentioning

confidence: 99%

Manufacture of Three-Dimensional Optofluidic Spot-Size Converters in Fused Silica Using Hybrid Laser Microfabrication

Zhang

et al. 2022

Sensors

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We propose a hybrid laser microfabrication approach for the manufacture of three-dimensional (3D) optofluidic spot-size converters in fused silica glass by a combination of femtosecond (fs) laser microfabrication and carbon dioxide laser irradiation. Spatially shaped fs laser-assisted chemical etching was first performed to form 3D hollow microchannels in glass, which were composed of embedded straight channels, tapered channels, and vertical channels connected to the glass surface. Then, carbon dioxide laser-induced thermal reflow was carried out for the internal polishing of the whole microchannels and sealing parts of the vertical channels. Finally, 3D optofluidic spot-size converters (SSC) were formed by filling a liquid-core waveguide solution into laser-polished microchannels. With a fabricated SSC structure, the mode spot size of the optofluidic waveguide was expanded from ~8 μm to ~23 μm with a conversion efficiency of ~84.1%. Further measurement of the waveguide-to-waveguide coupling devices in the glass showed that the total insertion loss of two symmetric SSC structures through two ~50 μm-diameter coupling ports was ~6.73 dB at 1310 nm, which was only about half that of non-SSC structures with diameters of ~9 μm at the same coupling distance. The proposed approach holds great potential for developing novel 3D fluid-based photonic devices for mode conversion, optical manipulation, and lab-on-a-chip sensing.

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Fabrication of single-mode circular optofluidic waveguides in fused silica using femtosecond laser microfabrication

Cited by 25 publications

References 35 publications

Three-Dimensional Large-Scale Fused Silica Microfluidic Chips Enabled by Hybrid Laser Microfabrication for Continuous-Flow UV Photochemical Synthesis

Three-Dimensional Large-Scale Fused Silica Microfluidic Chips Enabled by Hybrid Laser Microfabrication for Continuous-Flow UV Photochemical Synthesis

Fabrication of microlens on fused silica by femtosecond laser combined with wet etching

Manufacture of Three-Dimensional Optofluidic Spot-Size Converters in Fused Silica Using Hybrid Laser Microfabrication

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