Fabrication of Single-Walled Carbon-Nanotube-Based Pressure Sensors

Stampfer, Christoph; Helbling, T.; Obergfell, Dirk; Schoberle, Bernd; Mk, Tripp; Jungen, A.; Roth, S.; Vm, Bright; Hierold, Christofer

doi:10.1021/nl052171d

Cited by 332 publications

(259 citation statements)

References 25 publications

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“…More recently, a SWNT-based pressure sensor was constructed by electron-beam lithography and a bulk micromachining process [14]. The pressure sensor consisted of an individual metallic SWNT on top of a 100 nm thick circular alumina membrane with a radius of 50-100 m. The piezoresistive gauge factor was characterized to be approximately 210.…”

Section: Introductionmentioning

confidence: 99%

Toward Carbon Nanotube-Based AFM Cantilevers

Tong

Sun

2007

IEEE Trans. Nanotechnology

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Abstract-The mechanical properties of carbon nanotubes have been widely employed to enhance the performance of atomic force microscopy (AFM) cantilever tips. Utilizing the electromechanical properties of carbon nanotubes, this paper investigates the potential of using carbon nanotubes as active strain sensing elements on AFM cantilevers. A batch microfabrication process was developed to construct silicon microcantilevers. Multiwalled carbon nanotubes were dielectrophoretically assembled between electrodes. Based on the characterization results of 12 devices, the CNT-based cantilevers demonstrated a linear relationship between resistance changes and externally applied strain. The gauge factor ranged from 78.84 to 134.40 for four different device configurations.Index Terms-Atomic force microscopy, cantilevers, carbon nanotubes, MEMS/NEMS (micro/nanoelectromechanical systems).

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Section: Introductionmentioning

confidence: 99%

Toward Carbon Nanotube-Based AFM Cantilevers

Tong

Sun

2007

IEEE Trans. Nanotechnology

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“…A vailability of atomically thin piezoelectric materials are expected to have numerous applications in the area of nanoelectromechanical systems, which include stretchable smart electronics 1 , skins 2 , switches 3 and many types of sensors [4][5][6] , among others. Currently, boron nitride nanosheets appear to be the only material system that fit this profile.…”

mentioning

confidence: 99%

“…Recent works suggest that, somewhat thicker-at three atomic layers-molybdenum disulphide and tungsten disulphide sheets are also piezoelectric 7 . Graphene, owing to both its exotic properties and abundant availability, is arguably the most well-understood two-dimensional (2D) material and with several emergent applications [2][3][4][5][6]8 . Unfortunately, graphene is inherently non-piezoelectric and (usually) conductive (exceptions being certain configurations of graphene nanoribbons).…”

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confidence: 99%

Anomalous piezoelectricity in two-dimensional graphene nitride nanosheets

et al. 2014

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Piezoelectricity is a unique property of materials that permits the conversion of mechanical stimuli into electrical and vice versa. On the basis of crystal symmetry considerations, pristine carbon nitride (C 3 N 4 ) in its various forms is non-piezoelectric. Here we find clear evidence via piezoresponse force microscopy and quantum mechanical calculations that both atomically thin and layered graphitic carbon nitride, or graphene nitride, nanosheets exhibit anomalous piezoelectricity. Insights from ab inito calculations indicate that the emergence of piezoelectricity in this material is due to the fact that a stable phase of graphene nitride nanosheet is riddled with regularly spaced triangular holes. These non-centrosymmetric pores, and the universal presence of flexoelectricity in all dielectrics, lead to the manifestation of the apparent and experimentally verified piezoelectric response. Quantitatively, an e 11 piezoelectric coefficient of 0.758 C m À 2 is predicted for C 3 N 4 superlattice, significantly larger than that of the commonly compared a-quartz.

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“…79,80 The potential of SWNTs as functional transducer elements in classically designed piezoresistive pressure sensors was demonstrated by investigating the electromechanical behavior of SWNTs adhering to thin film membranes under small strain. 81,82 The signal-to-noise ratio of the devices is highest in the off-state of small bandgap semiconducting (SGS) SWNTs, which consequently imperatively requires their individually accessible integration (T. Helbling et al, unpublished data). 83 FIG.…”

Section: Swnt-based Piezoresistive Pressure Sensorsmentioning

confidence: 99%

Large-scale integration of single-walled carbon nanotubes and graphene into sensors and devices using dielectrophoresis: A review

Burg

Poulikakos

2011

J. Mater. Res.

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Device and sensor miniaturization has enabled extraordinary functionality and sensitivity enhancements over the last decades while considerably reducing fabrication costs and energy consumption. The traditional materials and process technologies used today will, however, ultimately run into fundamental limitations. Combining large-scale directed assembly methods with highsymmetry low-dimensional carbon nanomaterials is expected to contribute toward overcoming shortcomings of traditional process technologies and pave the way for commercially viable device nanofabrication. The purpose of this article is to review the guided dielectrophoretic integration of individual single-walled carbon nanotube (SWNT)-and graphene-based devices and sensors targeting continuous miniaturization. The review begins by introducing the electrokinetic framework of the dielectrophoretic deposition process, then discusses the importance of high-quality solutions, followed by the site-and type-selective integration of SWNTs and graphene with emphasis on experimental methods, and concludes with an overview of dielectrophoretically assembled devices and sensors to date. The field of dielectrophoretic device integration is filled with opportunities to research emerging materials, bottom-up integration processes, and promising applications. The ultimate goal is to fabricate ultra-small functional devices at high throughput and low costs, which require only minute operation power.

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Fabrication of Single-Walled Carbon-Nanotube-Based Pressure Sensors

Cited by 332 publications

References 25 publications

Toward Carbon Nanotube-Based AFM Cantilevers

Toward Carbon Nanotube-Based AFM Cantilevers

Anomalous piezoelectricity in two-dimensional graphene nitride nanosheets

Large-scale integration of single-walled carbon nanotubes and graphene into sensors and devices using dielectrophoresis: A review

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