Fabrication of sinusoidal-shaped multi-tip diamond tools by a focused ion beam machining process

Abstract

Multi-tip diamond (MTD) tools have remarkable advantages in scratching micro-nano structures. A key component of inertial confinement fusion is a glass capsule with a periodic sinusoidal ripple nanostructure, and its processing requires very low surface roughness and a consistent nanostructure. Using MTD tools for force servo machining is an efficient method, and the focused ion beam (FIB) method has been effective in machining multi-tip diamond tools. To machine an MTD tool with high precision and efficiency, experiments were conducted to explore the influence of FIB machining parameters on tip geometries. The tip of a MTD tool with a three-dimensional periodic sinusoidal ripple was successfully prepared using optimized processing parameters. The results demonstrated that the estimated amplitude and period machining error was less than 1.71% and 1.63%, respectively, for nanoscale structured tips. Related research provides a new solution for the cross-scale and efficient processing of nanostructures.