Fabrication of Small-Scale Solid-State Nanopores by Dielectric Breakdown

Gu, Zengdao; Ma, Dexian; Zhang, Zhicheng; Yin, Zheng; Sha, Jingjie

doi:10.1109/nems50311.2020.9265603

Cited by 1 publication

(1 citation statement)

References 23 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…However, they both exhibit high costs and operational complexities [ 6 ]. In contrast, controlled dielectric breakdown emerges as a highly convenient and cost-effective method for nanopore fabrication [ 26 , 27 , 28 , 29 , 30 , 31 ]. This technique requires only a device capable of generating controllable voltage/current pulses, a feature readily available in most laboratories.…”

Section: Introductionmentioning

confidence: 99%

Detection of Biomolecules Using Solid-State Nanopores Fabricated by Controlled Dielectric Breakdown

Cheng,

Zhao,

Pan

et al. 2024

Sensors

View full text Add to dashboard Cite

Nanopore sensor technology is widely used in biomolecular detection due to its advantages of low cost and easy operation. In a variety of nanopore manufacturing methods, controlled dielectric breakdown has the advantages of a simple manufacturing process and low cost under the premise of ensuring detection performance. In this paper, we have made enhancements to the applied pulses in controlled dielectric breakdown and utilized the improved dielectric breakdown technique to fabricate silicon nitride nanopores with diameters of 5 to 15 nm. Our improved fabrication method offers the advantage of precise control over the nanopore diameter (±0.4 nm) and enhances the symmetry of the nanopore. After fabrication, we performed electrical characterization on the nanopores, and the IV characteristics exhibited high linearity. Subsequently, we conducted detection experiments for DNA and protein using the prepared nanopores to assess the detection performance of the nanopores fabricated using our method. In addition, we also give a physical model of molecule translocation through the nanopores to give a reasonable explanation of the data processing results.

show abstract