Thermoplastic micro- and nanofluidics are increasing
in popularity
due to their favorable chemical and physical properties as an alternative
to poly(dimethyl siloxane) (PDMS)-based devices, which are more widely
used in academia. Additionally, their fabrication is compatible with
industrial processes, such as hot embossing and injection molding.
Nevertheless, producing devices with sub-micrometer channel heights
and low roughness while retaining high-throughput molding remains
challenging. This article details the combination of grayscale e-beam
lithography (g-EBL) and injection molding as a fabrication route for
capillary 3D thermoplastic nanofluidic devices with unprecedented
accuracy in the sub-micrometer range. We employed g-EBL to pattern
the device profile in a poly(methyl methacrylate) (PMMA)-based resist,
which served as a substrate for the subsequent fabrication of a negative
nickel mold by using electroforming. These molds are used to fabricate
devices in PMMA and cyclic olefin polymers (COP) using injection molding.
We show that the 3D height profile of the nanofluidic devices is maintained
throughout the entire replication cycle within very tight tolerances,
retaining its nanoscale topography on a millimeter-length scale. Moreover,
somewhat surprisingly, the roughness in the inflow section of the
devices was significantly reduced, which we attribute to the nickel
mold fabrication. Last, we show that the capillary-driven devices
can be used to size-dependently trap nanoparticles of various sizes
in a reliable and facile manner while only requiring a 4 μL
sample volume. The presented device and fabrication procedure paves
the way for applications in various scientific fields, ranging from
immunology to neurology and material science, in a cost-effective
manner.